Systematic mask synthesis for surface micromachined microelectromechanical systems
dc.contributor.author | Ananthakrishnan, Venkataraman | en_US |
dc.contributor.author | Sarma, Radha | en_US |
dc.contributor.author | Ananthasuresh, Gondi Kondaiah. | en_US |
dc.date.accessioned | 2006-12-19T19:09:34Z | |
dc.date.available | 2006-12-19T19:09:34Z | |
dc.date.issued | 2003-11-01 | en_US |
dc.identifier.citation | Ananthakrishnan, Venkataraman; Sarma, Radha; Ananthasuresh, G K (2003). "Systematic mask synthesis for surface micromachined microelectromechanical systems." Journal of Micromechanics and Microengineering. 13(6): 927-941. <http://hdl.handle.net/2027.42/49041> | en_US |
dc.identifier.issn | 0960-1317 | en_US |
dc.identifier.uri | https://hdl.handle.net/2027.42/49041 | |
dc.description.abstract | In the context of designing surface-micromachined microelectromechanical systems (MEMS), there does not appear to be systematic means, with the exception of parametrized layout models, to generate the mask data after the geometric model of a MEMS device is refined through behavioral simulations. This paper focuses on automatically generating masks, given a geometric model of the MEMS device and the process sequence (referred to here as the inverse problem). This necessitates a systematic solution of the forward problem, which involves automatically generating a geometric model of the MEMS device given the masks. A systematic and implementation-independent framework for the geometric modeling of MEMS is presented in order to solve the forward and inverse problems for general surface-micromachined devices. In particular, the geometric problem of mask synthesis is reduced to a system of linear equations. | en_US |
dc.format.extent | 3118 bytes | |
dc.format.extent | 1517857 bytes | |
dc.format.mimetype | text/plain | |
dc.format.mimetype | application/pdf | |
dc.language.iso | en_US | |
dc.publisher | IOP Publishing Ltd | en_US |
dc.title | Systematic mask synthesis for surface micromachined microelectromechanical systems | en_US |
dc.type | Article | en_US |
dc.subject.hlbsecondlevel | Physics | en_US |
dc.subject.hlbtoplevel | Science | en_US |
dc.description.peerreviewed | Peer Reviewed | en_US |
dc.contributor.affiliationum | Department of Mechanical Engineering, The University of Michigan, Ann Arbor, MI 48105, USA | en_US |
dc.contributor.affiliationother | Pathway Technologies, Inc, Blue Bell, PA 19422, USA | en_US |
dc.contributor.affiliationother | Department of Mechanical Engineering and Applied Mechanics, University of Pennsylvania, Philadelphia PA 19104, USA | en_US |
dc.contributor.affiliationumcampus | Ann Arbor | en_US |
dc.description.bitstreamurl | http://deepblue.lib.umich.edu/bitstream/2027.42/49041/2/jm3616.pdf | en_US |
dc.identifier.doi | http://dx.doi.org/10.1088/0960-1317/13/6/316 | en_US |
dc.identifier.source | Journal of Micromechanics and Microengineering. | en_US |
dc.owningcollname | Interdisciplinary and Peer-Reviewed |
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