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Two Approaches to Micromachining Si Heat Exchanger for Joule-Thompson Cryosurgical Probes
Zhu, W.; White, M. J.; Hoch, D. W.; Nellis, Gregory F.; Klein, S. A.; Gianchandani, Yogesh B.
2007-01
Citation:W. Zhu, J. White, D. W. Hoch, G. F. Nellis, S. A. Klein, and Y. B. Gianchandani, "Two Approaches to Micromachining Si Heat Exchanger for Joule-Thompson Cryosurgical Probes," 20th IEEE International Conference on Micro Electro Mechanical Systems (MEMS), Kobe, Japan, January 2007. <http://hdl.handle.net/2027.42/60939>
