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| Title: | A Planar Glass/Si Micromachining Process for the Heat Exchanger in a J-T Cryosurgical Probe |
| Authors: | Zhu, W.
Hoch, D.W.
Nellis, G.F.
Klein, S.A.
Gianchandani, Y.B. |
| Issue Date: | Jun-2006 |
| Citation: | W. Zhu, D.W. Hoch, G.F. Nellis, S.A. Klein, and Y.B. Gianchandani, "A Planar Glass/Si Micromachining Process for the Heat Exchanger in a J-T Cryosurgical Probe," Solid-State Sensors and Actuators Workshop, Hilton Head Island, South Carolina, pp.51-55, June 2006 <http://hdl.handle.net/2027.42/60940> |
| Description: | NIH 5R33EB003349-05 |
| Appears in Collections: | Electrical Engineering and Computer Science, Department of (EECS)
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