Dynamic growth effects during low-pressure deposition of diamond films
dc.contributor.author | Gilbert, Donald R. | en_US |
dc.contributor.author | Singh, Rajiv | en_US |
dc.contributor.author | Clarke, Roy | en_US |
dc.contributor.author | Murugkar, S. | en_US |
dc.date.accessioned | 2010-05-06T20:56:44Z | |
dc.date.available | 2010-05-06T20:56:44Z | |
dc.date.issued | 1997-04-14 | en_US |
dc.identifier.citation | Gilbert, Donald R.; Singh, Rajiv; Clarke, Roy; Murugkar, S. (1997). "Dynamic growth effects during low-pressure deposition of diamond films." Applied Physics Letters 70(15): 1974-1976. <http://hdl.handle.net/2027.42/69661> | en_US |
dc.identifier.uri | https://hdl.handle.net/2027.42/69661 | |
dc.description.abstract | Diamond films were deposited in a modified electron–cyclotron-resonance plasma system operating at pressures between 1.0 and 2.0 Torr. This system provides the advantage of efficient plasma generation due to magnetic enhancement and high diffusion rates due to relatively low-pressure operation. Films were formed from preexisting seed layers providing high “nucleation” densities to promote rapid coalescence. Raman analysis of grown films showed a quality dependence on both deposition pressure and nucleation density. We speculate that the increased presence of amorphous carbon and larger film stresses is the result of grain-boundary impurity effects in the seeded films. Oxygen addition improved film quality by reducing nondiamond carbon incorporation. © 1997 American Institute of Physics. | en_US |
dc.format.extent | 3102 bytes | |
dc.format.extent | 360711 bytes | |
dc.format.mimetype | text/plain | |
dc.format.mimetype | application/pdf | |
dc.publisher | The American Institute of Physics | en_US |
dc.rights | © The American Institute of Physics | en_US |
dc.title | Dynamic growth effects during low-pressure deposition of diamond films | en_US |
dc.type | Article | en_US |
dc.subject.hlbsecondlevel | Physics | en_US |
dc.subject.hlbtoplevel | Science | en_US |
dc.description.peerreviewed | Peer Reviewed | en_US |
dc.contributor.affiliationum | Department of Applied Physics, University of Michigan, Ann Arbor, Michigan 48109 | en_US |
dc.contributor.affiliationother | Department of Materials Science and Engineering, University of Florida, Gainesville, Florida 32611 | en_US |
dc.description.bitstreamurl | http://deepblue.lib.umich.edu/bitstream/2027.42/69661/2/APPLAB-70-15-1974-1.pdf | |
dc.identifier.doi | 10.1063/1.118796 | en_US |
dc.identifier.source | Applied Physics Letters | en_US |
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dc.owningcollname | Physics, Department of |
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