Selective deposition of polycrystalline silicon thin films at low temperature by hot‐wire chemical vapor deposition
dc.contributor.author | Yu, S. | en_US |
dc.contributor.author | Gulari, Erdogan | en_US |
dc.contributor.author | Kanicki, Jerzy | en_US |
dc.date.accessioned | 2010-05-06T21:27:06Z | |
dc.date.available | 2010-05-06T21:27:06Z | |
dc.date.issued | 1996-05-06 | en_US |
dc.identifier.citation | Yu, S.; Gulari, E.; Kanicki, J. (1996). "Selective deposition of polycrystalline silicon thin films at low temperature by hot‐wire chemical vapor deposition." Applied Physics Letters 68(19): 2681-2683. <http://hdl.handle.net/2027.42/69983> | en_US |
dc.identifier.uri | https://hdl.handle.net/2027.42/69983 | |
dc.description.abstract | Polycrystalline silicon thin films have been selectively deposited at a substrate temperature of 300 °C on molybdenum or silicon over silicon dioxide, silicon nitride or Corning 7059 glass substrates in a continuous hot‐wire chemical vapor deposition (HWCVD) process involving hydrogen and disilane. Excellent selectivity is achieved on features as small as 1 μm spaced molybdenum lines. The deposition rate on molybdenum is 60–100 Å/min which is higher than that obtained by a pulsed gas plasma‐enhanced chemical vapor deposition (PECVD) or a very high‐frequency PECVD (VHF‐PECVD). The selective deposition rate obtained in our system is attributed to the high concentration of atomic hydrogen generated when molecular hydrogen passes over a heated tungsten filament. © 1996 American Institute of Physics. | en_US |
dc.format.extent | 3102 bytes | |
dc.format.extent | 174736 bytes | |
dc.format.mimetype | text/plain | |
dc.format.mimetype | application/pdf | |
dc.publisher | The American Institute of Physics | en_US |
dc.rights | © The American Institute of Physics | en_US |
dc.title | Selective deposition of polycrystalline silicon thin films at low temperature by hot‐wire chemical vapor deposition | en_US |
dc.type | Article | en_US |
dc.subject.hlbsecondlevel | Physics | en_US |
dc.subject.hlbtoplevel | Science | en_US |
dc.description.peerreviewed | Peer Reviewed | en_US |
dc.contributor.affiliationum | Center for Display Technology and Manufacturing, University of Michigan, Ann Arbor, Michigan 48109 | en_US |
dc.description.bitstreamurl | http://deepblue.lib.umich.edu/bitstream/2027.42/69983/2/APPLAB-68-19-2681-1.pdf | |
dc.identifier.doi | 10.1063/1.116280 | en_US |
dc.identifier.source | Applied Physics Letters | en_US |
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dc.owningcollname | Physics, Department of |
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