Dynamics of electron beam ablation of silicon dioxide measured by dye laser resonance absorption photography
dc.contributor.author | Kovaleski, S. D. | en_US |
dc.contributor.author | Gilgenbach, Ronald M. | en_US |
dc.contributor.author | Ang, L. K. | en_US |
dc.contributor.author | Lau, Y. Y. | en_US |
dc.date.accessioned | 2010-05-06T21:31:52Z | |
dc.date.available | 2010-05-06T21:31:52Z | |
dc.date.issued | 1998-11-02 | en_US |
dc.identifier.citation | Kovaleski, S. D.; Gilgenbach, R. M.; Ang, L. K.; Lau, Y. Y. (1998). "Dynamics of electron beam ablation of silicon dioxide measured by dye laser resonance absorption photography." Applied Physics Letters 73(18): 2576-2578. <http://hdl.handle.net/2027.42/70034> | en_US |
dc.identifier.uri | https://hdl.handle.net/2027.42/70034 | |
dc.description.abstract | The dynamics of electron beam ablation plumes have been characterized through the application of dye laser resonance absorption photography. The ablation of fused silica by a channelspark electron beam was studied by probing the near-ground state, 3p2 1D−4s 1P03p21D−4s1P0 neutral Si transition at 288.158 nm. Necessary background gases (Ar or N2)N2) were tested at pressures of 15 or 30 mTorr. A two-lobed, Si atom plume shape was discovered that is hydrodynamically more complex than laser ablation plumes. These plumes merge into a single-lobed plume at about 400 ns after the e-beam current pulse rise. Plume front expansion velocities of Si atoms were measured at nearly 1 cm/μs, and are comparable to the expansion of laser ablated metal atom plumes with laser fluences of a few J/cm2. © 1998 American Institute of Physics. | en_US |
dc.format.extent | 3102 bytes | |
dc.format.extent | 932495 bytes | |
dc.format.mimetype | text/plain | |
dc.format.mimetype | application/pdf | |
dc.publisher | The American Institute of Physics | en_US |
dc.rights | © The American Institute of Physics | en_US |
dc.title | Dynamics of electron beam ablation of silicon dioxide measured by dye laser resonance absorption photography | en_US |
dc.type | Article | en_US |
dc.subject.hlbsecondlevel | Physics | en_US |
dc.subject.hlbtoplevel | Science | en_US |
dc.description.peerreviewed | Peer Reviewed | en_US |
dc.contributor.affiliationum | Intense Energy Beam Interaction Laboratory, Department of Nuclear Engineering and Radiological Sciences, The University of Michigan, Ann Arbor, Michigan 48109-2104 | en_US |
dc.description.bitstreamurl | http://deepblue.lib.umich.edu/bitstream/2027.42/70034/2/APPLAB-73-18-2576-1.pdf | |
dc.identifier.doi | 10.1063/1.122510 | en_US |
dc.identifier.source | Applied Physics Letters | en_US |
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dc.identifier.citedreference | S. D. Kovaleski, R. M. Gilgenbach, L. K. Ang, Y. Y. Lau, and J. S. Lash, Appl. Surf. Sci. ASUSEE127–129, 947 (1998). | en_US |
dc.identifier.citedreference | Th. Witke, A. Lenk, B. Schultrich, and C. Schultheiss, Surf. Coat. Technol. SCTEEJ74–75, 580 (1995). | en_US |
dc.identifier.citedreference | R. M. Gilgenbach and P. L. G. Ventzek, Appl. Phys. Lett. APPLAB58, 1597 (1991). | en_US |
dc.identifier.citedreference | R. A. Lindley, R. M. Gilgenbach, C. H. Ching, and J. S. Lash, J. Appl. Phys. JAPIAU76, 5457 (1994). | en_US |
dc.owningcollname | Physics, Department of |
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