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Extraction of ions from the matrix sheath in ablation-plasma ion implantation

dc.contributor.authorQi, Boen_US
dc.contributor.authorLau, Y. Y.en_US
dc.contributor.authorGilgenbach, Ronald M.en_US
dc.date.accessioned2010-05-06T22:59:56Z
dc.date.available2010-05-06T22:59:56Z
dc.date.issued2001-02-05en_US
dc.identifier.citationQi, Bo; Lau, Y. Y.; Gilgenbach, R. M. (2001). "Extraction of ions from the matrix sheath in ablation-plasma ion implantation." Applied Physics Letters 78(6): 706-708. <http://hdl.handle.net/2027.42/70969>en_US
dc.identifier.urihttps://hdl.handle.net/2027.42/70969
dc.description.abstractA simple one-dimensional theory is presented to assess the implantation of ions from the ion matrix sheath (IMS) in an ablated plasma plume that is approaching a negatively biased substrate. Under the assumption that the plume geometry, the electron and ion density distributions, and the potential distribution are frozen during the IMS extraction, the implanted ion current is calculated as a function of time for various substrate-plume separations. This model accurately recovers Lieberman’s classic results when the plume front is initially in contact with the substrate. © 2001 American Institute of Physics.en_US
dc.format.extent3102 bytes
dc.format.extent53200 bytes
dc.format.mimetypetext/plain
dc.format.mimetypeapplication/pdf
dc.publisherThe American Institute of Physicsen_US
dc.rights© The American Institute of Physicsen_US
dc.titleExtraction of ions from the matrix sheath in ablation-plasma ion implantationen_US
dc.typeArticleen_US
dc.subject.hlbsecondlevelPhysicsen_US
dc.subject.hlbtoplevelScienceen_US
dc.description.peerreviewedPeer Revieweden_US
dc.contributor.affiliationumDepartment of Nuclear Engineering and Radiological Sciences, University of Michigan, Ann Arbor, Michigan 48109-2104en_US
dc.description.bitstreamurlhttp://deepblue.lib.umich.edu/bitstream/2027.42/70969/2/APPLAB-78-6-706-1.pdf
dc.identifier.doi10.1063/1.1343842en_US
dc.identifier.sourceApplied Physics Lettersen_US
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dc.owningcollnamePhysics, Department of


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