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Imaging nanostructures with coherent phonon pulses
Daly, B. C.; Holme, N. C. R.; Buma, T.; Branciard, C.; Norris, T. B.; Tennant, D. M.; Taylor, J. A.; Bower, J. E.; Pau, S.
2004-06-21
Citation:Daly, B. C.; Holme, N. C. R.; Buma, T.; Branciard, C.; Norris, T. B.; Tennant, D. M.; Taylor, J. A.; Bower, J. E.; Pau, S. (2004). "Imaging nanostructures with coherent phonon pulses." Applied Physics Letters 84(25): 5180-5182. <http://hdl.handle.net/2027.42/71146>
Abstract: We demonstrate submicron resolution imaging using picosecond acoustic phonon pulses. High-frequency acoustic pulses are generated by impulsive thermoelastic excitation of a patterned 15-nm15-nm-thick metal film on a crystalline substrate using ultrafast optical pulses. The spatiotemporal diffracted acoustic strain field is measured on the opposite side of the substrate, and this field is used in a time-reversal algorithm to reconstruct the object. The image resolution is characterized using lithographically defined 1-micron1-micron-period Al structures on Si. Straightforward technical improvements should lead to resolution approaching 45 nm45nm, extending the resolution of acoustic microscopy into the nanoscale regime.
