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Cubic Silsesquioxanes as a Green, High-Performance Mold Material for Nanoimprint Lithography

dc.contributor.authorRo, Hyun Wooken_US
dc.contributor.authorPopova, Veraen_US
dc.contributor.authorChen, Leien_US
dc.contributor.authorForster, Aaron M.en_US
dc.contributor.authorDing, Yifuen_US
dc.contributor.authorAlvine, Kyle J.en_US
dc.contributor.authorKrug, Dave J.en_US
dc.contributor.authorLaine, Richard M.en_US
dc.contributor.authorSoles, Christopher L.en_US
dc.date.accessioned2011-01-04T16:25:11Z
dc.date.available2012-02-21T18:47:01Zen_US
dc.date.issued2011-01-18en_US
dc.identifier.citationRo, Hyun Wook; Popova, Vera; Chen, Lei; Forster, Aaron M.; Ding, Yifu; Alvine, Kyle J.; Krug, Dave J.; Laine, Richard M.; Soles, Christopher L. (2011). "Cubic Silsesquioxanes as a Green, High-Performance Mold Material for Nanoimprint Lithography." Advanced Materials 23(3): 414-420. <http://hdl.handle.net/2027.42/78504>en_US
dc.identifier.issn0935-9648en_US
dc.identifier.issn1521-4095en_US
dc.identifier.urihttps://hdl.handle.net/2027.42/78504
dc.description.abstractNo Abstracten_US
dc.format.extent519363 bytes
dc.format.extent3118 bytes
dc.format.mimetypeapplication/pdf
dc.format.mimetypetext/plain
dc.publisherWILEY-VCH Verlagen_US
dc.subject.otherChemistryen_US
dc.subject.otherPolymer and Materials Scienceen_US
dc.titleCubic Silsesquioxanes as a Green, High-Performance Mold Material for Nanoimprint Lithographyen_US
dc.typeArticleen_US
dc.rights.robotsIndexNoFollowen_US
dc.subject.hlbsecondlevelEngineering (General)en_US
dc.subject.hlbsecondlevelMaterials Science and Engineeringen_US
dc.subject.hlbtoplevelEngineeringen_US
dc.description.peerreviewedPeer Revieweden_US
dc.contributor.affiliationumDepartment of Materials Science and Engineering, University of Michigan, Ann Arbor, MI 48109, Michigan 48109-2136, USAen_US
dc.contributor.affiliationotherPolymers Division, National Institute of Standards and Technology (NIST), 100 Bureau Dr., Mail Stop 8541, Gaithersburg, MD 20899, USA ; Polymers Division, National Institute of Standards and Technology (NIST), 100 Bureau Dr., Mail Stop 8541, Gaithersburg, MD 20899, USA.en_US
dc.contributor.affiliationotherMayaterials Inc., 661 Airport Blvd. Suite 1, Ann Arbor, MI 47108, USAen_US
dc.contributor.affiliationotherCenter for Nanoscale Science and Technology, National Institute of Standards and Technology (NIST), 100 Bureau Dr., Mail Stop 6201, Gaithersburg, MD 20899, USAen_US
dc.contributor.affiliationotherMaterials and Construction Research Division, National Institute of Standards and Technology (NIST), 100 Bureau Dr., Mail Stop 8615, Gaithersburg, MD 20899, USAen_US
dc.contributor.affiliationotherPolymers Division, National Institute of Standards and Technology (NIST), 100 Bureau Dr., Mail Stop 8541, Gaithersburg, MD 20899, USAen_US
dc.contributor.affiliationotherPolymers Division, National Institute of Standards and Technology (NIST), 100 Bureau Dr., Mail Stop 8541, Gaithersburg, MD 20899, USAen_US
dc.contributor.affiliationotherMayaterials Inc., 661 Airport Blvd. Suite 1, Ann Arbor, MI 47108, USAen_US
dc.contributor.affiliationotherPolymers Division, National Institute of Standards and Technology (NIST), 100 Bureau Dr., Mail Stop 8541, Gaithersburg, MD 20899, USA ; Polymers Division, National Institute of Standards and Technology (NIST), 100 Bureau Dr., Mail Stop 8541, Gaithersburg, MD 20899, USA.en_US
dc.identifier.pmid20715068en_US
dc.description.bitstreamurlhttp://deepblue.lib.umich.edu/bitstream/2027.42/78504/1/414_ftp.pdf
dc.identifier.doi10.1002/adma.201001761en_US
dc.identifier.sourceAdvanced Materialsen_US
dc.owningcollnameInterdisciplinary and Peer-Reviewed


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