Monte Carlo modeling of YBCO vapor deposition

Abstract

A three dimensional electron beam physical vapor deposition process of super-conducting films of YBa2Cu3O7−δYBa2Cu3O7−δ in a vacuum chamber is investigated both computationally and experimentally. The numerical analysis employs the direct simulation Monte Carlo (DSMC) method. Some important modeling issues such as atomic collision cross-sections for metal vapors and hyperfine electronic structure of the atomic absorption spectra are addressed. Film deposition thickness profiles and atomic absorption spectra given by the DSMC method and experiment for pure yttrium evaporation are in excellent agreement. Interaction between the vapor jets is found to have a significant effect on the film growth rate and species molar ratio that are key factors of the film technology. © 2001 American Institute of Physics.