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The Direct Patterning of Nanoporous Interlayer Dielectric Insulator Films by Nanoimprint Lithography Ro, H. W.; Jones, Ronald L.; Peng, Huagen; Hines, D. R.; Lee, H. -J.; Lin, Erik K.; Karim, Alamgir; Yoon, D. Y.; Gidley, D. W. (WILEY-VCH Verlag, 2007-10-05)