Heated Motorized Stage for Nanoscale Thin Film Deposition

Abstract

Thin film deposition is a technology of applying a very thin film of material onto a substrate surface to be coated, or onto a previously deposited coating to form layers. As a modified Atomic Layer Deposition (ALD) method, Spatial ALD greatly improves the efficiency of the process by separating the half-reactions spatially instead of through the use of purge steps in convectional ALD. This paper proposes the use of heated motorized stage as a research prototype to further study the effect of deposition conditions such as gap size, gap alignment and substrate temperature on the SALD coating results. This strategy utilized three stepper motors and high precision non-contact gap sensors to control gap alignment and gap size between the substrate and the depositor. The details of the involved methodology, engineering analysis, validation of the final design and the design critiques are discussed in this paper.