View Item 

Show simple item record

Improvement of integrated utrasonic transducer sensitivity
dc.contributor.authorMo, Jian-Huaen_US
dc.contributor.authorRobinson, Andrew L.en_US
dc.contributor.authorTerry, Fred L. Jr.en_US
dc.contributor.authorFitting, Dale W.en_US
dc.contributor.authorCarson, Paul L.en_US
dc.date.accessioned2006-04-07T20:48:52Z
dc.date.available2006-04-07T20:48:52Z
dc.date.issued1989-06en_US
dc.identifier.citationMo, Jian-Hua, Robinson, Andrew L., Terry, Jr., Fred L., Fitting, Dale W., Carson, Paul L. (1989/06)."Improvement of integrated utrasonic transducer sensitivity." Sensors and Actuators A: Physical 22(1-3): 679-682. <http://hdl.handle.net/2027.42/27930>en_US
dc.identifier.urihttp://www.sciencedirect.com/science/article/B6THG-449TX3J-4T/2/a3c3809a609ba2a6084cfd37b5612a2een_US
dc.identifier.urihttps://hdl.handle.net/2027.42/27930
dc.description.abstractIn this paper, we present a micromachined diaphragm structure for integrated ultrasound transducers. This structure greatly reduces the parasitic capacitance between the lower electrode and the conductive Si substrate in a nonmicromachined structure. The micromachining improves both sensitivity and minimum detectable signal. It also reduces crosstalk between transducer elements.en_US
dc.format.extent386647 bytes
dc.format.extent3118 bytes
dc.format.mimetypeapplication/pdf
dc.format.mimetypetext/plain
dc.language.isoen_US
dc.publisherElsevieren_US
dc.titleImprovement of integrated utrasonic transducer sensitivityen_US
dc.typeArticleen_US
dc.rights.robotsIndexNoFollowen_US
dc.subject.hlbsecondlevelMechanical Engineeringen_US
dc.subject.hlbsecondlevelIndustrial and Operations Engineeringen_US
dc.subject.hlbtoplevelEngineeringen_US
dc.description.peerreviewedPeer Revieweden_US
dc.contributor.affiliationumSolid-State Electronics Laboratory, Department of Electrical Engineering and Computer Science, University of Michigan, Ann Arbor, MI 48109-2122 U.S.A.en_US
dc.contributor.affiliationumSolid-State Electronics Laboratory, Department of Electrical Engineering and Computer Science, University of Michigan, Ann Arbor, MI 48109-2122 U.S.A.en_US
dc.contributor.affiliationumSolid-State Electronics Laboratory, Department of Electrical Engineering and Computer Science, University of Michigan, Ann Arbor, MI 48109-2122 U.S.A.en_US
dc.contributor.affiliationumRadiology Physics and Engineering Division, Department of Radiology, University of Michigan Medical Center, Ann Arbor, MI 48104 U.S.A.en_US
dc.contributor.affiliationumRadiology Physics and Engineering Division, Department of Radiology, University of Michigan Medical Center, Ann Arbor, MI 48104 U.S.A.en_US
dc.description.bitstreamurlhttp://deepblue.lib.umich.edu/bitstream/2027.42/27930/1/0000354.pdfen_US
dc.identifier.doihttp://dx.doi.org/10.1016/0924-4247(89)80057-3en_US
dc.identifier.sourceSensors and Actuators A: Physicalen_US
dc.owningcollnameInterdisciplinary and Peer-Reviewed


Files in this item

Name:
0000354.pdf
Size:
377.5KB
Format:
PDF
View/Open

Show simple item record

Remediation of Harmful Language

The University of Michigan Library aims to describe library materials in a way that respects the people and communities who create, use, and are represented in our collections. Report harmful or offensive language in catalog records, finding aids, or elsewhere in our collections anonymously through our metadata feedback form. More information at Remediation of Harmful Language.

Accessibility

If you are unable to use this file in its current format, please select the Contact Us link and we can modify it to make it more accessible to you.