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Digital compensation of high-performance silicon pressure transducers

dc.contributor.authorCrary, Selden B.en_US
dc.contributor.authorBaer, Wayne G.en_US
dc.contributor.authorCowles, John C.en_US
dc.contributor.authorWise, K. D. (Kensall D.)en_US
dc.date.accessioned2006-04-10T13:50:21Z
dc.date.available2006-04-10T13:50:21Z
dc.date.issued1990-02en_US
dc.identifier.citationCrary, Selden B., Baer, Wayne G., Cowles, John C., Wise, Kensall D. (1990/02)."Digital compensation of high-performance silicon pressure transducers." Sensors and Actuators A: Physical 21(1-3): 70-72. <http://hdl.handle.net/2027.42/28729>en_US
dc.identifier.urihttp://www.sciencedirect.com/science/article/B6THG-449TWW4-G/2/791446b1c20a72e5bbc498d5af22b102en_US
dc.identifier.urihttps://hdl.handle.net/2027.42/28729
dc.description.abstractCalibration and compensation have been performed on two silicon piezoresistive pressure transducers and a silicon capacitive pressure sensor, using a semi-automated, computer-based system. Stepwise regression using polynomial functions is shown to be a useful technique for the calibration and compensation of these devices.en_US
dc.format.extent310588 bytes
dc.format.extent3118 bytes
dc.format.mimetypeapplication/pdf
dc.format.mimetypetext/plain
dc.language.isoen_US
dc.publisherElsevieren_US
dc.titleDigital compensation of high-performance silicon pressure transducersen_US
dc.typeArticleen_US
dc.rights.robotsIndexNoFollowen_US
dc.subject.hlbsecondlevelMechanical Engineeringen_US
dc.subject.hlbsecondlevelIndustrial and Operations Engineeringen_US
dc.subject.hlbtoplevelEngineeringen_US
dc.description.peerreviewedPeer Revieweden_US
dc.contributor.affiliationumCenter for Integrated Sensors and Circuits, Solid-State Electronics Laboratory, University of Michigan, Ann Arbor, MI 48109-2122 U.S.A.en_US
dc.contributor.affiliationumCenter for Integrated Sensors and Circuits, Solid-State Electronics Laboratory, University of Michigan, Ann Arbor, MI 48109-2122 U.S.A.en_US
dc.contributor.affiliationumCenter for Integrated Sensors and Circuits, Solid-State Electronics Laboratory, University of Michigan, Ann Arbor, MI 48109-2122 U.S.A.en_US
dc.contributor.affiliationumCenter for Integrated Sensors and Circuits, Solid-State Electronics Laboratory, University of Michigan, Ann Arbor, MI 48109-2122 U.S.A.en_US
dc.description.bitstreamurlhttp://deepblue.lib.umich.edu/bitstream/2027.42/28729/1/0000555.pdfen_US
dc.identifier.doihttp://dx.doi.org/10.1016/0924-4247(90)85014-Uen_US
dc.identifier.sourceSensors and Actuators A: Physicalen_US
dc.owningcollnameInterdisciplinary and Peer-Reviewed


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