Digital compensation of high-performance silicon pressure transducers
dc.contributor.author | Crary, Selden B. | en_US |
dc.contributor.author | Baer, Wayne G. | en_US |
dc.contributor.author | Cowles, John C. | en_US |
dc.contributor.author | Wise, K. D. (Kensall D.) | en_US |
dc.date.accessioned | 2006-04-10T13:50:21Z | |
dc.date.available | 2006-04-10T13:50:21Z | |
dc.date.issued | 1990-02 | en_US |
dc.identifier.citation | Crary, Selden B., Baer, Wayne G., Cowles, John C., Wise, Kensall D. (1990/02)."Digital compensation of high-performance silicon pressure transducers." Sensors and Actuators A: Physical 21(1-3): 70-72. <http://hdl.handle.net/2027.42/28729> | en_US |
dc.identifier.uri | http://www.sciencedirect.com/science/article/B6THG-449TWW4-G/2/791446b1c20a72e5bbc498d5af22b102 | en_US |
dc.identifier.uri | https://hdl.handle.net/2027.42/28729 | |
dc.description.abstract | Calibration and compensation have been performed on two silicon piezoresistive pressure transducers and a silicon capacitive pressure sensor, using a semi-automated, computer-based system. Stepwise regression using polynomial functions is shown to be a useful technique for the calibration and compensation of these devices. | en_US |
dc.format.extent | 310588 bytes | |
dc.format.extent | 3118 bytes | |
dc.format.mimetype | application/pdf | |
dc.format.mimetype | text/plain | |
dc.language.iso | en_US | |
dc.publisher | Elsevier | en_US |
dc.title | Digital compensation of high-performance silicon pressure transducers | en_US |
dc.type | Article | en_US |
dc.rights.robots | IndexNoFollow | en_US |
dc.subject.hlbsecondlevel | Mechanical Engineering | en_US |
dc.subject.hlbsecondlevel | Industrial and Operations Engineering | en_US |
dc.subject.hlbtoplevel | Engineering | en_US |
dc.description.peerreviewed | Peer Reviewed | en_US |
dc.contributor.affiliationum | Center for Integrated Sensors and Circuits, Solid-State Electronics Laboratory, University of Michigan, Ann Arbor, MI 48109-2122 U.S.A. | en_US |
dc.contributor.affiliationum | Center for Integrated Sensors and Circuits, Solid-State Electronics Laboratory, University of Michigan, Ann Arbor, MI 48109-2122 U.S.A. | en_US |
dc.contributor.affiliationum | Center for Integrated Sensors and Circuits, Solid-State Electronics Laboratory, University of Michigan, Ann Arbor, MI 48109-2122 U.S.A. | en_US |
dc.contributor.affiliationum | Center for Integrated Sensors and Circuits, Solid-State Electronics Laboratory, University of Michigan, Ann Arbor, MI 48109-2122 U.S.A. | en_US |
dc.description.bitstreamurl | http://deepblue.lib.umich.edu/bitstream/2027.42/28729/1/0000555.pdf | en_US |
dc.identifier.doi | http://dx.doi.org/10.1016/0924-4247(90)85014-U | en_US |
dc.identifier.source | Sensors and Actuators A: Physical | en_US |
dc.owningcollname | Interdisciplinary and Peer-Reviewed |
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