Comparative study of hot embossed micro structures fabricated by laboratory and commercial environments
dc.contributor.author | Cheng, Y. -T. | en_US |
dc.contributor.author | Lin, L. | en_US |
dc.contributor.author | Chiu, C. -J. | en_US |
dc.date.accessioned | 2006-09-08T20:12:36Z | |
dc.date.available | 2006-09-08T20:12:36Z | |
dc.date.issued | 1998-05 | en_US |
dc.identifier.citation | Lin, L.; Cheng, Y.-T.; Chiu, C.-J.; (1998). "Comparative study of hot embossed micro structures fabricated by laboratory and commercial environments." Microsystem Technologies 4(3): 113-116. <http://hdl.handle.net/2027.42/42317> | en_US |
dc.identifier.issn | 0946-7076 | en_US |
dc.identifier.uri | https://hdl.handle.net/2027.42/42317 | |
dc.description.abstract | Hot embossed microstructures fabricated by laboratory and commercial environments have been studied. The laboratory process uses silicon with micropyramid patterns as the mold insert. Fine replication by using Polymethyl Methacrylate (PMMA) has been achieved. The commercial process uses electroplated nickel as the mold insert. Polyvinyl Chloride (PVC), which has a lower glass transition point than PMMA, has been used as the raw material. Fabrication results show that the laboratory process, although taking about 2 hours long per run, can successfully replicate microstructures. The commercial process which takes only 1 minute per run may be fine tuned for good replication. Atomic Force Microscope (AFM) has been used to analyze the fabricated microstructures. It is found that the root mean square (r.m.s.) roughness of PMMA is about 4 nm and that of PVC is about 10–15 nm. Defects including voids and bumps on both PMMA and PVC films have been found. | en_US |
dc.format.extent | 652081 bytes | |
dc.format.extent | 3115 bytes | |
dc.format.mimetype | application/pdf | |
dc.format.mimetype | text/plain | |
dc.language.iso | en_US | |
dc.publisher | Springer-Verlag; Springer-Verlag Berlin Heidelberg | en_US |
dc.subject.other | Legacy | en_US |
dc.title | Comparative study of hot embossed micro structures fabricated by laboratory and commercial environments | en_US |
dc.type | Article | en_US |
dc.subject.hlbsecondlevel | Electrical Engineering | en_US |
dc.subject.hlbtoplevel | Engineering | en_US |
dc.description.peerreviewed | Peer Reviewed | en_US |
dc.contributor.affiliationum | Department of Mechanical Engineering and Applied Mechanics University of Michigan 2350 Hayward Street, Ann Arbor, MI 48109, USA, US | en_US |
dc.contributor.affiliationum | Department of Electrical Engineering and Computer Science University of Michigan 1301 Beal Avenue, Ann Arbor, MI 48109, USA, US | en_US |
dc.contributor.affiliationother | Institute of Applied Mechanics, National Taiwan University, Taipei, Taiwan, 106, ROC, TW | en_US |
dc.contributor.affiliationumcampus | Ann Arbor | en_US |
dc.description.bitstreamurl | http://deepblue.lib.umich.edu/bitstream/2027.42/42317/1/542-4-3-113_80040113.pdf | en_US |
dc.identifier.doi | http://dx.doi.org/10.1007/s005420050109 | en_US |
dc.identifier.source | Microsystem Technologies | en_US |
dc.owningcollname | Interdisciplinary and Peer-Reviewed |
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