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Browsing Mechanical Engineering, Department of by Author
Browsing Mechanical Engineering, Department of by Author
Now showing items 1-2 of 2
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Gianchandani, Yogesh B.; Najafi, Khalil (IOP Publishing Ltd, 1992-06-01)
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A fabrication process for integrating polysilicon microstructures with post-processed CMOS circuits Gianchandani, Yogesh B.; Kim, H.; Shinn, M.; Ha, B.; Lee, B.; Najafi, Khalil; Song, C. (IOP Publishing Ltd, 2000-09-01)