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An integrated vapor source with a porous silicon wick

dc.contributor.authorWallner, J. Z.en_US
dc.contributor.authorKunt, K. S.en_US
dc.contributor.authorObanionwu, H.en_US
dc.contributor.authorOborny, M. C.en_US
dc.contributor.authorBergstrom, P. L.en_US
dc.contributor.authorZellers, Edward T.en_US
dc.date.accessioned2007-09-20T18:41:54Z
dc.date.available2008-09-08T14:25:14Zen_US
dc.date.issued2007-05en_US
dc.identifier.citationWallner, J. Z.; Kunt, K. S.; Obanionwu, H.; Oborny, M. C.; Bergstrom, P. L.; Zellers, E. T. (2007)."An integrated vapor source with a porous silicon wick." physica status solidi a 204(5): 1449-1453. <http://hdl.handle.net/2027.42/56056>en_US
dc.identifier.issn0031-8965en_US
dc.identifier.issn1521-396Xen_US
dc.identifier.urihttps://hdl.handle.net/2027.42/56056
dc.description.abstractA micro vapor source has been developed for calibrating micro gas chromatograph (ΜGC) systems. By utilizing a porous silicon wick in a micro diffusion system, vapor generation with excellent stability has been achieved. The source has shown uniform and repeatable vapor generation for n-decane with less than a 0.1% variation in 9 hours, and less than a 0.5% variation in rate over 7 days. The evolution rate follows the diffusion model as expected, although the room temperature rate is higher than theoretically predicted. Equipped with a refillable reservoir, this vapor source is suitable for extended ΜGC field deployment. (© 2007 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim)en_US
dc.format.extent629526 bytes
dc.format.extent3118 bytes
dc.format.mimetypeapplication/pdf
dc.format.mimetypetext/plain
dc.publisherWILEY-VCH Verlagen_US
dc.subject.otherPhysicsen_US
dc.titleAn integrated vapor source with a porous silicon wicken_US
dc.typeArticleen_US
dc.rights.robotsIndexNoFollowen_US
dc.subject.hlbsecondlevelPhysicsen_US
dc.subject.hlbsecondlevelElectrical Engineering and Computer Scienceen_US
dc.subject.hlbsecondlevelMaterials Science and Engineeringen_US
dc.subject.hlbtoplevelScienceen_US
dc.subject.hlbtoplevelEngineeringen_US
dc.description.peerreviewedPeer Revieweden_US
dc.contributor.affiliationumDepartment of Electrical and Computer Engineering, Michigan Technological University, 1400 Townsend Drive, Houghton, MI 49931-1295, USA ; Engineering Research Center for Wireless Integrated MicroSystems, the University of Michigan, Ann Arbor, MI, USA ; Phone: +1 906 487 2550, Fax: +1 906 487 2949en_US
dc.contributor.affiliationumEngineering Research Center for Wireless Integrated MicroSystems, the University of Michigan, Ann Arbor, MI, USAen_US
dc.contributor.affiliationumEngineering Research Center for Wireless Integrated MicroSystems, the University of Michigan, Ann Arbor, MI, USAen_US
dc.contributor.affiliationumEngineering Research Center for Wireless Integrated MicroSystems, the University of Michigan, Ann Arbor, MI, USA ; Sandia National Laboratories, Albuquerque, NM, USAen_US
dc.contributor.affiliationumDepartment of Electrical and Computer Engineering, Michigan Technological University, 1400 Townsend Drive, Houghton, MI 49931-1295, USA ; Engineering Research Center for Wireless Integrated MicroSystems, the University of Michigan, Ann Arbor, MI, USAen_US
dc.contributor.affiliationumEngineering Research Center for Wireless Integrated MicroSystems, the University of Michigan, Ann Arbor, MI, USAen_US
dc.description.bitstreamurlhttp://deepblue.lib.umich.edu/bitstream/2027.42/56056/1/1449_ftp.pdfen_US
dc.identifier.doihttp://dx.doi.org/10.1002/pssa.200674383en_US
dc.identifier.sourcephysica status solidi aen_US
dc.owningcollnameInterdisciplinary and Peer-Reviewed


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