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Immersion scatterometry for improved nano-scale topography measurements
dc.contributor.authorLiu, Elsonen_US
dc.date.accessioned2008-05-12T13:35:08Z
dc.date.available2009-04-09T15:01:14Zen_US
dc.date.issued2008-04en_US
dc.identifier.citationLiu, Elson (2008). "Immersion scatterometry for improved nano-scale topography measurements." physica status solidi a 205(4): 784-788. <http://hdl.handle.net/2027.42/58552>en_US
dc.identifier.issn0031-8965en_US
dc.identifier.issn1521-396Xen_US
dc.identifier.urihttps://hdl.handle.net/2027.42/58552
dc.description.abstractSpectroscopic ellipsometry measurement of periodic structures (“scatterometry”) has become a standard method for critical dimension and topography measurement in the integrated circuit industry. As dimensions are reduced, this method may not be adequate for research and process control. Use of immersion mode measurements may extend the usefulness of near UV specular scatterometry. In this paper, we present the first experimental measurements of gratings in water immersion and discuss the issues in achieving improved nano-topography measurements with this method. (© 2008 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim)en_US
dc.format.extent498950 bytes
dc.format.extent3118 bytes
dc.format.mimetypeapplication/pdf
dc.format.mimetypetext/plain
dc.publisherWILEY-VCH Verlagen_US
dc.subject.otherPhysicsen_US
dc.titleImmersion scatterometry for improved nano-scale topography measurementsen_US
dc.typeArticleen_US
dc.rights.robotsIndexNoFollowen_US
dc.subject.hlbsecondlevelElectrical Engineering and Computer Scienceen_US
dc.subject.hlbsecondlevelMaterials Science and Engineeringen_US
dc.subject.hlbsecondlevelPhysicsen_US
dc.subject.hlbtoplevelEngineeringen_US
dc.subject.hlbtoplevelScienceen_US
dc.description.peerreviewedPeer Revieweden_US
dc.contributor.affiliationumDepartment of EECS, University of Michigan, Ann Arbor, MI, USAen_US
dc.description.bitstreamurlhttp://deepblue.lib.umich.edu/bitstream/2027.42/58552/1/784_ftp.pdf
dc.identifier.doihttp://dx.doi.org/10.1002/pssa.200777756en_US
dc.identifier.sourcephysica status solidi aen_US
dc.owningcollnameInterdisciplinary and Peer-Reviewed


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