Two Approaches to Micromachining Si Heat Exchanger for Joule-Thompson Cryosurgical Probes

Zhu, W.; White, Michael J.; Hoch, D. W.; Nellis, Gregory F.; Klein, Sanford A.; Gianchandani, Yogesh B.

Two Approaches to Micromachining Si Heat Exchanger for Joule-Thompson Cryosurgical Probes

dc.contributor.author	Zhu, W.
dc.contributor.author	White, Michael J.
dc.contributor.author	Hoch, D. W.
dc.contributor.author	Nellis, Gregory F.
dc.contributor.author	Klein, Sanford A.
dc.contributor.author	Gianchandani, Yogesh B.
dc.date.accessioned	2008-09-17T16:57:23Z
dc.date.available	2008-09-17T16:57:23Z
dc.date.issued	2007-01
dc.identifier.citation	W. Zhu, J. White, D. W. Hoch, G. F. Nellis, S. A. Klein, and Y. B. Gianchandani, "Two Approaches to Micromachining Si Heat Exchanger for Joule-Thompson Cryosurgical Probes," 20th IEEE International Conference on Micro Electro Mechanical Systems (MEMS), Kobe, Japan, January 2007. <http://hdl.handle.net/2027.42/60939>	en
dc.identifier.uri	https://hdl.handle.net/2027.42/60939
dc.description.sponsorship	NIH 5R33EB003349-05	en
dc.format.extent	1100267 bytes
dc.format.mimetype	application/pdf
dc.language.iso	en_US	en
dc.publisher	IEEE	en
dc.title	Two Approaches to Micromachining Si Heat Exchanger for Joule-Thompson Cryosurgical Probes	en
dc.type	Article	en
dc.subject.hlbsecondlevel	Electrical Engineering
dc.subject.hlbsecondlevel	Computer Science
dc.subject.hlbtoplevel	Engineering
dc.contributor.affiliationum	Electrical Engineering and Computer Science, Department of	en
dc.contributor.affiliationumcampus	Ann Arbor	en
dc.description.bitstreamurl	http://deepblue.lib.umich.edu/bitstream/2027.42/60939/1/1533_Zhu.pdf
dc.owningcollname	Electrical Engineering and Computer Science, Department of (EECS)

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