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Kinetic theory of adsorption and desorption of gases on semiconductor surfaces : progress report
dc.contributor.authorLee, Vin-Jangen_US
dc.contributor.authorMason, Donald R.en_US
dc.date.accessioned2006-02-03T16:46:14Z
dc.date.available2006-02-03T16:46:14Z
dc.date.issued1963en_US
dc.identifierUMR2448en_US
dc.identifier.urihttps://hdl.handle.net/2027.42/6220
dc.format.extent59 bytes
dc.format.extent75782 bytes
dc.format.extent3366 bytes
dc.format.extent90452 bytes
dc.format.extent3903901 bytes
dc.format.mimetypetext/plain
dc.format.mimetypetext/plain
dc.format.mimetypetext/plain
dc.format.mimetypetext/plain
dc.format.mimetypeapplication/pdf
dc.language.isoen_USen_US
dc.subjectSemiconductors -- Surfaces -- Chemistry -- Research.en_US
dc.subjectAdsorption -- Research.en_US
dc.titleKinetic theory of adsorption and desorption of gases on semiconductor surfaces : progress reporten_US
dc.typeTechnical Reporten_US
dc.subject.hlbtoplevelEngineeringen_US
dc.description.bitstreamurlhttp://deepblue.lib.umich.edu/bitstream/2027.42/6220/5/bac6801.0001.001.pdfen_US
dc.description.bitstreamurlhttp://deepblue.lib.umich.edu/bitstream/2027.42/6220/4/bac6801.0001.001.txten_US
dc.owningcollnameEngineering, College of - Technical Reports


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