Large‐aperture, axially symmetric ion‐optical lens systems using new types of electrostatic and magnetic elements

Abstract

We have developed new types of ion‐optical systems having larger solid angles (i.e., collecting power) and flexibility than many existing designs. They use relatively simple axially symmetric elements, namely solenoids, axial magnetic dipoles, and radial electric field lenses. The systems can focus, with good optical properties, energetic ions in the range of tens of keV up to tens of MeV kinetic energy and are capable of operating in nondispersive, achromatic modes. The key elements for the latter are new types of defocusing magnetic and electrostatic correction lenses. The lens systems have applications in any existing devices used to collect and focus energetic ions (including electrons). Typical devices are: mass spectrometers, leak detectors and gas analyzers, ion sources, accelerators and ion implantation systems, nuclear particle spectrometers, electron microscopes, ion microprobes, and ion‐beam lenses for cancer therapy.