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In situ thin-film texture determination
dc.contributor.authorLitvinov, Dmitrien_US
dc.contributor.authorO’donnell, Thomasen_US
dc.contributor.authorClarke, Royen_US
dc.date.accessioned2010-05-06T20:30:06Z
dc.date.available2010-05-06T20:30:06Z
dc.date.issued1999-02-15en_US
dc.identifier.citationLitvinov, Dmitri; O’Donnell, Thomas; Clarke, Roy (1999). "In situ thin-film texture determination." Journal of Applied Physics 85(4): 2151-2156. <http://hdl.handle.net/2027.42/69371>en_US
dc.identifier.urihttps://hdl.handle.net/2027.42/69371
dc.description.abstractA kinematic theory of reflection high energy electron diffraction (RHEED) is presented for textured polycrystalline thin films. RHEED patterns are calculated for arbitrary texture situations and for any general crystallographic orientation that may be encountered in thin-film growth. It is shown that the RHEED pattern can be used as a fast and convenient tool for in situ texture characterization. The approach also permits quantitative extraction of angular dispersion parameters which are useful for optimizing thin-film growth conditions. © 1999 American Institute of Physics.en_US
dc.format.extent3102 bytes
dc.format.extent946775 bytes
dc.format.mimetypetext/plain
dc.format.mimetypeapplication/pdf
dc.publisherThe American Institute of Physicsen_US
dc.rights© The American Institute of Physicsen_US
dc.titleIn situ thin-film texture determinationen_US
dc.typeArticleen_US
dc.subject.hlbsecondlevelPhysicsen_US
dc.subject.hlbtoplevelScienceen_US
dc.description.peerreviewedPeer Revieweden_US
dc.contributor.affiliationumRandall Laboratory of Physics, University of Michigan, Ann Arbor, Michigan 48109-1120en_US
dc.description.bitstreamurlhttp://deepblue.lib.umich.edu/bitstream/2027.42/69371/2/JAPIAU-85-4-2151-1.pdf
dc.identifier.doi10.1063/1.369519en_US
dc.identifier.sourceJournal of Applied Physicsen_US
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dc.owningcollnamePhysics, Department of


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