Thermophysical effects in laser processing of materials with picosecond and femtosecond pulses

Abstract

Application of picosecond and femtosecond laser pulses to the controlled ablation of materials represents a relatively unexplored yet important topic in laser processing. Such ultrashort pulses are of potential value in areas of thin‐film deposition, micromachining, and surgical procedures. We report here some early results of systematic studies being done from the femtosecond to the nanosecond regime, as an assessment of the problems and benefits associated with various laser pulse durations and their use in processing optically absorbing media. Experimental data and theoretical results of computer simulations are presented and compared for the threshold energies of ablation in gold as a function of pulse width from 10 ns to 100 fs. This work is then extended to include further numerically computed results for gold and silicon on ablation rates, threshold surface temperatures, liquid thicknesses, and vaporization rates as a function of pulse duration throughout the ultrafast regime from tens of femtoseconds to a few hundred picoseconds. © 1995 American Institute of Physics.