The Gaseous Electronics Conference radio‐frequency reference cell: A defined parallel‐plate radio‐frequency system for experimental and theoretical studies of plasma‐processing discharges
dc.contributor.author | Hargis, P. J. | en_US |
dc.contributor.author | Greenberg, K. E. | en_US |
dc.contributor.author | Miller, P. A. | en_US |
dc.contributor.author | Gerardo, J. B. | en_US |
dc.contributor.author | Torczynski, J. R. | en_US |
dc.contributor.author | Riley, M. E. | en_US |
dc.contributor.author | Hebner, G. A. | en_US |
dc.contributor.author | Roberts, J. R. | en_US |
dc.contributor.author | Olthoff, J. K. | en_US |
dc.contributor.author | Whetstone, J. R. | en_US |
dc.contributor.author | Van Brunt, R. J. | en_US |
dc.contributor.author | Sobolewski, M. A. | en_US |
dc.contributor.author | Anderson, H. M. | en_US |
dc.contributor.author | Splichal, M. P. | en_US |
dc.contributor.author | Mock, J. L. | en_US |
dc.contributor.author | Bletzinger, P. | en_US |
dc.contributor.author | Garscadden, A. | en_US |
dc.contributor.author | Gottscho, R. A. | en_US |
dc.contributor.author | Selwyn, G. | en_US |
dc.contributor.author | Dalvie, M. | en_US |
dc.contributor.author | Heidenreich, J. E. | en_US |
dc.contributor.author | Butterbaugh, Jeffery W. | en_US |
dc.contributor.author | Brake, Mary L. | en_US |
dc.contributor.author | Passow, Michael L. | en_US |
dc.contributor.author | Pender, J. T. P. | en_US |
dc.contributor.author | Lujan, A. | en_US |
dc.contributor.author | Elta, Michael E. | en_US |
dc.contributor.author | Graves, D. B. | en_US |
dc.contributor.author | Sawin, H. H. | en_US |
dc.contributor.author | Kushner, Mark J. | en_US |
dc.contributor.author | Verdeyen, J. T. | en_US |
dc.contributor.author | Horwath, R. | en_US |
dc.contributor.author | Turner, T. R. | en_US |
dc.date.accessioned | 2010-05-06T22:05:32Z | |
dc.date.available | 2010-05-06T22:05:32Z | |
dc.date.issued | 1994-01 | en_US |
dc.identifier.citation | Hargis, P. J.; Greenberg, K. E.; Miller, P. A.; Gerardo, J. B.; Torczynski, J. R.; Riley, M. E.; Hebner, G. A.; Roberts, J. R.; Olthoff, J. K.; Whetstone, J. R.; Van Brunt, R. J.; Sobolewski, M. A.; Anderson, H. M.; Splichal, M. P.; Mock, J. L.; Bletzinger, P.; Garscadden, A.; Gottscho, R. A.; Selwyn, G.; Dalvie, M.; Heidenreich, J. E.; Butterbaugh, Jeffery W.; Brake, M. L.; Passow, M. L.; Pender, J.; Lujan, A.; Elta, M. E.; Graves, D. B.; Sawin, H. H.; Kushner, M. J.; Verdeyen, J. T.; Horwath, R.; Turner, T. R. (1994). "The Gaseous Electronics Conference radio‐frequency reference cell: A defined parallel‐plate radio‐frequency system for experimental and theoretical studies of plasma‐processing discharges." Review of Scientific Instruments 65(1): 140-154. <http://hdl.handle.net/2027.42/70394> | en_US |
dc.identifier.uri | https://hdl.handle.net/2027.42/70394 | |
dc.description.abstract | A ‘‘reference cell’’ for generating radio‐frequency (rf) glow discharges in gases at a frequency of 13.56 MHz is described. The reference cell provides an experimental platform for comparing plasma measurements carried out in a common reactor geometry by different experimental groups, thereby enhancing the transfer of knowledge and insight gained in rf discharge studies. The results of performing ostensibly identical measurements on six of these cells in five different laboratories are analyzed and discussed. Measurements were made of plasma voltage and current characteristics for discharges in pure argon at specified values of applied voltages, gas pressures, and gas flow rates. Data are presented on relevant electrical quantities derived from Fourier analysis of the voltage and current wave forms. Amplitudes, phase shifts, self‐bias voltages, and power dissipation were measured. Each of the cells was characterized in terms of its measured internal reactive components. Comparing results from different cells provides an indication of the degree of precision needed to define the electrical configuration and operating parameters in order to achieve identical performance at various laboratories. The results show, for example, that the external circuit, including the reactive components of the rf power source, can significantly influence the discharge. Results obtained in reference cells with identical rf power sources demonstrate that considerable progress has been made in developing a phenomenological understanding of the conditions needed to obtain reproducible discharge conditions in independent reference cells. | en_US |
dc.format.extent | 3102 bytes | |
dc.format.extent | 2027583 bytes | |
dc.format.mimetype | text/plain | |
dc.format.mimetype | application/pdf | |
dc.publisher | The American Institute of Physics | en_US |
dc.rights | © The American Institute of Physics | en_US |
dc.title | The Gaseous Electronics Conference radio‐frequency reference cell: A defined parallel‐plate radio‐frequency system for experimental and theoretical studies of plasma‐processing discharges | en_US |
dc.type | Article | en_US |
dc.subject.hlbsecondlevel | Physics | en_US |
dc.subject.hlbtoplevel | Science | en_US |
dc.description.peerreviewed | Peer Reviewed | en_US |
dc.contributor.affiliationum | Department of Nuclear Engineering, University of Michigan, Ann Arbor, Michigan 48109 | en_US |
dc.contributor.affiliationum | Department of Electrical Engineering, University of Michigan, Ann Arbor, Michigan 48109 | en_US |
dc.contributor.affiliationother | Sandia National Laboratories, Albuquerque, New Mexico 87185 | en_US |
dc.contributor.affiliationother | National Institute of Standards and Technology, Gaithersburg, Maryland 20899 | en_US |
dc.contributor.affiliationother | Department of Chemical and Nuclear Engineering, University of New Mexico, Albuquerque, New Mexico 87131 | en_US |
dc.contributor.affiliationother | Wright Laboratory, Wright Patterson Air Force Base, Ohio 45433 | en_US |
dc.contributor.affiliationother | AT&T Bell Laboratories, Murray Hill, New Jersey 07974 | en_US |
dc.contributor.affiliationother | IBM T. J. Watson Research Center, Yorktown Heights, New York 10598 | en_US |
dc.contributor.affiliationother | IBM General Technology Division, Essex Junction, Vermont 05452 | en_US |
dc.contributor.affiliationother | Department of Chemical Engineering, University of California, Berkeley, California 94720 | en_US |
dc.contributor.affiliationother | Department of Chemical Engineering, MIT, Cambridge, Massachussets 02139 | en_US |
dc.contributor.affiliationother | Department of Electrical Engineering, University of Illinois, Urbana, Illinois 61801 | en_US |
dc.contributor.affiliationother | SEMATECH, Austin, Texas 78741 | en_US |
dc.description.bitstreamurl | http://deepblue.lib.umich.edu/bitstream/2027.42/70394/2/RSINAK-65-1-140-1.pdf | |
dc.identifier.doi | 10.1063/1.1144770 | en_US |
dc.identifier.source | Review of Scientific Instruments | en_US |
dc.identifier.citedreference | P. J. Hargis, Jr., K. E. Greenberg, P. A. Miller, J. B. Gerardo, R. A. Gottscho, A. Garscadden, P. Bletzinger, J. R. Roberts, J. K. Olthoff, J. R. Whetstone, R. J. Van Brunt, H. M. Anderson, M. L. Passow, M. L. Brake, M. E. Elta, D. B. Graves, M. J. Kushner, J. T. Verdeyen, G. Selwyn, M. Dalvie, J. W. Butterbaugh, H. H. Sawin, T. R. Turner, and R. Horwath, Bull. Am. Phys. Soc. 36, 195 (1990). | en_US |
dc.identifier.citedreference | K. E. Greenberg, P. J. Hargis, Jr., and P. A. Miller, Sandia National Laboratories Report No. SETEC90-013, 1990. | en_US |
dc.identifier.citedreference | Send requests to P. J. Hargis, Jr., Sandia National Laboratories, Division 1128, P.O. Box 5800, Albuquerque, New Mexico 87185-0601. | en_US |
dc.identifier.citedreference | P. A. Miller and M. Kamon, Sandia National Laboratories Report No. SETEC90-009, 1990. | en_US |
dc.identifier.citedreference | J. R. Roberts, J. K. Olthoff, R. J. Van Brunt, and J. R. Whetstone, Proc. SPIE 1392, 428 (1990); P. A. Miller, 1594, 179 (1991). | en_US |
dc.identifier.citedreference | J. T. Verdeyen and P. A. Miller, in GEC 91, 44th Annual Gaseous Electronics Conference, 22–25 October, 1991, Albuquerque, New Mexico, Program and Abstracts (University of New Mexico, Albuquerque, 1991), p. 70; M. A. Sobolewski, J. K. Olthoff, J. R. Whetstone, and J. Roberts, ibid, p. 72; J. T. Verdeyen, Sandia National Laboratories Report No. SAND 92-7284, 1992. | en_US |
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dc.identifier.citedreference | S. L. Leonard, in Plasma Diagnostic Techniques, edited by R. H. Huddlestone and S. L. Leonard (Academic, New York, 1965), pp. 7–19. | en_US |
dc.identifier.citedreference | S. Humphries, Jr., Principles of Charged Particle Acceleration (Wiley, New York, 1986), pp. 267–282. | en_US |
dc.identifier.citedreference | P. A. Miller, H. M. Anderson, and M. P. Splichal, in GEC 91, 44th Annual Gaseous Electronics Conference, 22–25 October, 1991, Albuquerque, New Mexico, Program and Abstracts (University of New Mexico, Albuquerque, 1991), p. 69. | en_US |
dc.identifier.citedreference | P. A. Miller, H. M. Anderson, and M. P. Splichal, J. Appl. Phys. 71, 1171 (1992). | en_US |
dc.owningcollname | Physics, Department of |
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