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Modeling of an electron cyclotron resonance heated mirror plasma for highly charged ion and soft x‐ray sources
dc.contributor.authorBooske, J. H.en_US
dc.contributor.authorAldabe, F.en_US
dc.contributor.authorEllis, R. F.en_US
dc.contributor.authorGetty, W. D.en_US
dc.date.accessioned2010-05-06T23:04:52Z
dc.date.available2010-05-06T23:04:52Z
dc.date.issued1988-08-01en_US
dc.identifier.citationBooske, J. H.; Aldabe, F.; Ellis, R. F.; Getty, W. D. (1988). "Modeling of an electron cyclotron resonance heated mirror plasma for highly charged ion and soft x‐ray sources." Journal of Applied Physics 64(3): 1055-1067. <http://hdl.handle.net/2027.42/71021>en_US
dc.identifier.urihttps://hdl.handle.net/2027.42/71021
dc.description.abstractA model is described for predicting equilibrium ion charge state distributions and soft x‐ray emissions for highly charged ion plasmas confined in magnetic mirrors. Such a plasma would be generated and sustained with electron cyclotron resonance (ECR) heating. The model is then used to analyze a typical laboratory‐sized ECR mirror plasma such as MIMI [Phys. Fluids 28, 3116 (1985)]. Computations suggest that an experiment of this size should readily achieve a highly charged ion operating regime of relevance to studies of ECR highly charged ion plasma. In particular, these devices may be promising candidates as steady‐state soft x‐ray sources for x‐ray lithography.en_US
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dc.format.extent2438555 bytes
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dc.publisherThe American Institute of Physicsen_US
dc.rights© The American Institute of Physicsen_US
dc.titleModeling of an electron cyclotron resonance heated mirror plasma for highly charged ion and soft x‐ray sourcesen_US
dc.typeArticleen_US
dc.subject.hlbsecondlevelPhysicsen_US
dc.subject.hlbtoplevelScienceen_US
dc.description.peerreviewedPeer Revieweden_US
dc.contributor.affiliationumDepartment of Electrical Engineering and Computer Science, University of Michigan, Ann Arbor, Michigan 48109en_US
dc.contributor.affiliationotherLaboratory for Plasma and Fusion Energy Studies, University of Maryland, College Park, Maryland 20742‐3511en_US
dc.description.bitstreamurlhttp://deepblue.lib.umich.edu/bitstream/2027.42/71021/2/JAPIAU-64-3-1055-1.pdf
dc.identifier.doi10.1063/1.341890en_US
dc.identifier.sourceJournal of Applied Physicsen_US
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dc.owningcollnamePhysics, Department of


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