Laser diagnostic experiments on KrF laser ablation plasma‐plume dynamics relevant to manufacturing applications@f|

Gilgenbach, Ronald M.; Ching, Chi Hong; Lash, J. S.; Lindley, Roger A.

Laser diagnostic experiments on KrF laser ablation plasma‐plume dynamics relevant to manufacturing applications@f|

dc.contributor.author	Gilgenbach, Ronald M.	en_US
dc.contributor.author	Ching, Chi Hong	en_US
dc.contributor.author	Lash, J. S.	en_US
dc.contributor.author	Lindley, Roger A.	en_US
dc.date.accessioned	2010-05-06T23:20:31Z
dc.date.available	2010-05-06T23:20:31Z
dc.date.issued	1994-05	en_US
dc.identifier.citation	Gilgenbach, R. M.; Ching, C. H.; Lash, J. S.; Lindley, R. A. (1994). "Laser diagnostic experiments on KrF laser ablation plasma‐plume dynamics relevant to manufacturing applications@f\|." Physics of Plasmas 1(5): 1619-1625. <http://hdl.handle.net/2027.42/71186>	en_US
dc.identifier.uri	https://hdl.handle.net/2027.42/71186
dc.description.abstract	A brief review is given of the potential applications of laser ablation in the automotive and electronics manufacturing industries. Experiments are presented on KrF laser ablation of three materials relevant to manufacturing applications: aluminum metal vs aluminum–nitride (AlN) and alumina (Al2O3) ceramics. Plasma and neutral‐atom diagnostic data are presented from resonant‐holographic‐interferometry, dye‐laser‐resonance‐absorption photography, and HeNe laser deflection. Data show that plasma electron densities in excess of 1018 cm−3 exist in the ablation of AlN, with lower densities in Al and Al2O3. Aluminum neutral and ion expansion velocities are in the range of cm/μs. Ambipolar electric fields are estimated to be 5–50 V/cm.	en_US
dc.format.extent	3102 bytes
dc.format.extent	904925 bytes
dc.format.mimetype	text/plain
dc.format.mimetype	application/pdf
dc.publisher	The American Institute of Physics	en_US
dc.rights	© The American Institute of Physics	en_US
dc.title	Laser diagnostic experiments on KrF laser ablation plasma‐plume dynamics relevant to manufacturing applications@f\|	en_US
dc.type	Article	en_US
dc.subject.hlbsecondlevel	Physics	en_US
dc.subject.hlbtoplevel	Science	en_US
dc.description.peerreviewed	Peer Reviewed	en_US
dc.contributor.affiliationum	Intense Energy Beam Interaction Laboratory, Nuclear Engineering Department, University of Michigan, Ann Arbor, Michigan 48109‐2104	en_US
dc.description.bitstreamurl	http://deepblue.lib.umich.edu/bitstream/2027.42/71186/2/PHPAEN-1-5-1619-1.pdf
dc.identifier.doi	10.1063/1.870663	en_US
dc.identifier.source	Physics of Plasmas	en_US
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dc.owningcollname	Physics, Department of

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