High-Throughput, Continuous Nanopatterning Technologies for Display and Energy Applications.
dc.contributor.author | Ahn, Se Hyun | en_US |
dc.date.accessioned | 2010-06-03T15:53:35Z | |
dc.date.available | NO_RESTRICTION | en_US |
dc.date.available | 2010-06-03T15:53:35Z | |
dc.date.issued | 2010 | en_US |
dc.date.submitted | en_US | |
dc.identifier.uri | https://hdl.handle.net/2027.42/76015 | |
dc.description.abstract | The motivation of this work is to enable continuous patterning of nanostructures on flexible substrates to push nanoscale lithography to an entirely new level with drastically increased throughput. The Roll-to-Roll Nanoimprint Lithography (R2RNIL) technology presented in this work retains the high-resolution feature capabilities of traditional NIL, but with an increase in throughput by at least one or two orders of magnitude. We demonstrated large-area (4” wide) continuous imprinting of nanogratings by using a newly developed apparatus capable of roll-to-roll imprinting on flexible substrates (R2RNIL) and roll-to-plate imprinting on rigid substrates (R2PNIL). In addition, analytical models were developed to predict the residual layer thickness in dynamic R2RNIL. As a potential application, high-performance metal wire-grid polarizers have also been fabricated utilizing R2RNIL. Another research focus involved Direct Metal Imprinting (DMI) to create discrete nano-scale metal gratings. DMI uses a polymer cushion layer between a thin metal layer and a hard substrate, which enables room-temperature nanoimprinting of the metal by overcoming troublesome hard-to-hard surface contact issues while preserving the Si mold. We also introduced a novel nanofabrication technique, Dynamic Nano-Inscribing (DNI) for creating truly continuous nanograting patterns by using the sharp edge of a tilted Si mold on a variety of metals or polymer materials, creating linewidths down to 50 nm at extremely high speeds (~100 mm/sec) under ambient conditions. Additionally, a new nanograting fabrication method, Localized Dynamic Wrinkling (LDW) has been developed. LDW enables the continuous formation of micro/nano-scale gratings by simply sliding a flat edge of a cleaved Si wafer over the metal film. LDW shares the same basic principle as the buckling (wrinkling) phenomenon but the moving edge of the tilted Si wafer exerts stress on a metal coated polymer and sequentially generates localized winkles in the metal film in a dynamic fashion. The period in LDW can be controlled by several processing parameters and shows good agreement with a theoretical model. Finally, we developed a Dynamic Nano-Cutting (DNC) process using high-frequency indentations on a moving substrate to sequentially create nanograting patterns. DNC provides perfectly straight lines with real-time period modulation, which is difficult to achieve by other nanomanufacturing techniques. | en_US |
dc.format.extent | 7169624 bytes | |
dc.format.extent | 1373 bytes | |
dc.format.mimetype | application/pdf | |
dc.format.mimetype | text/plain | |
dc.language.iso | en_US | en_US |
dc.subject | High-throughput Continuous Nanopatterning for Display and Energy Applications | en_US |
dc.title | High-Throughput, Continuous Nanopatterning Technologies for Display and Energy Applications. | en_US |
dc.type | Thesis | en_US |
dc.description.thesisdegreename | PhD | en_US |
dc.description.thesisdegreediscipline | Mechanical Engineering | en_US |
dc.description.thesisdegreegrantor | University of Michigan, Horace H. Rackham School of Graduate Studies | en_US |
dc.contributor.committeemember | Guo, L. Jay | en_US |
dc.contributor.committeemember | Kurabayashi, Katsuo | en_US |
dc.contributor.committeemember | Kim, Jinsang | en_US |
dc.contributor.committeemember | Pipe, Kevin Patrick | en_US |
dc.subject.hlbsecondlevel | Electrical Engineering | en_US |
dc.subject.hlbsecondlevel | Mechanical Engineering | en_US |
dc.subject.hlbtoplevel | Engineering | en_US |
dc.description.bitstreamurl | http://deepblue.lib.umich.edu/bitstream/2027.42/76015/1/happyash_1.pdf | |
dc.owningcollname | Dissertations and Theses (Ph.D. and Master's) |
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