Cubic Silsesquioxanes as a Green, High-Performance Mold Material for Nanoimprint Lithography
dc.contributor.author | Ro, Hyun Wook | en_US |
dc.contributor.author | Popova, Vera | en_US |
dc.contributor.author | Chen, Lei | en_US |
dc.contributor.author | Forster, Aaron M. | en_US |
dc.contributor.author | Ding, Yifu | en_US |
dc.contributor.author | Alvine, Kyle J. | en_US |
dc.contributor.author | Krug, Dave J. | en_US |
dc.contributor.author | Laine, Richard M. | en_US |
dc.contributor.author | Soles, Christopher L. | en_US |
dc.date.accessioned | 2011-01-04T16:25:11Z | |
dc.date.available | 2012-02-21T18:47:01Z | en_US |
dc.date.issued | 2011-01-18 | en_US |
dc.identifier.citation | Ro, Hyun Wook; Popova, Vera; Chen, Lei; Forster, Aaron M.; Ding, Yifu; Alvine, Kyle J.; Krug, Dave J.; Laine, Richard M.; Soles, Christopher L. (2011). "Cubic Silsesquioxanes as a Green, High-Performance Mold Material for Nanoimprint Lithography." Advanced Materials 23(3): 414-420. <http://hdl.handle.net/2027.42/78504> | en_US |
dc.identifier.issn | 0935-9648 | en_US |
dc.identifier.issn | 1521-4095 | en_US |
dc.identifier.uri | https://hdl.handle.net/2027.42/78504 | |
dc.description.abstract | No Abstract | en_US |
dc.format.extent | 519363 bytes | |
dc.format.extent | 3118 bytes | |
dc.format.mimetype | application/pdf | |
dc.format.mimetype | text/plain | |
dc.publisher | WILEY-VCH Verlag | en_US |
dc.subject.other | Chemistry | en_US |
dc.subject.other | Polymer and Materials Science | en_US |
dc.title | Cubic Silsesquioxanes as a Green, High-Performance Mold Material for Nanoimprint Lithography | en_US |
dc.type | Article | en_US |
dc.rights.robots | IndexNoFollow | en_US |
dc.subject.hlbsecondlevel | Engineering (General) | en_US |
dc.subject.hlbsecondlevel | Materials Science and Engineering | en_US |
dc.subject.hlbtoplevel | Engineering | en_US |
dc.description.peerreviewed | Peer Reviewed | en_US |
dc.contributor.affiliationum | Department of Materials Science and Engineering, University of Michigan, Ann Arbor, MI 48109, Michigan 48109-2136, USA | en_US |
dc.contributor.affiliationother | Polymers Division, National Institute of Standards and Technology (NIST), 100 Bureau Dr., Mail Stop 8541, Gaithersburg, MD 20899, USA ; Polymers Division, National Institute of Standards and Technology (NIST), 100 Bureau Dr., Mail Stop 8541, Gaithersburg, MD 20899, USA. | en_US |
dc.contributor.affiliationother | Mayaterials Inc., 661 Airport Blvd. Suite 1, Ann Arbor, MI 47108, USA | en_US |
dc.contributor.affiliationother | Center for Nanoscale Science and Technology, National Institute of Standards and Technology (NIST), 100 Bureau Dr., Mail Stop 6201, Gaithersburg, MD 20899, USA | en_US |
dc.contributor.affiliationother | Materials and Construction Research Division, National Institute of Standards and Technology (NIST), 100 Bureau Dr., Mail Stop 8615, Gaithersburg, MD 20899, USA | en_US |
dc.contributor.affiliationother | Polymers Division, National Institute of Standards and Technology (NIST), 100 Bureau Dr., Mail Stop 8541, Gaithersburg, MD 20899, USA | en_US |
dc.contributor.affiliationother | Polymers Division, National Institute of Standards and Technology (NIST), 100 Bureau Dr., Mail Stop 8541, Gaithersburg, MD 20899, USA | en_US |
dc.contributor.affiliationother | Mayaterials Inc., 661 Airport Blvd. Suite 1, Ann Arbor, MI 47108, USA | en_US |
dc.contributor.affiliationother | Polymers Division, National Institute of Standards and Technology (NIST), 100 Bureau Dr., Mail Stop 8541, Gaithersburg, MD 20899, USA ; Polymers Division, National Institute of Standards and Technology (NIST), 100 Bureau Dr., Mail Stop 8541, Gaithersburg, MD 20899, USA. | en_US |
dc.identifier.pmid | 20715068 | en_US |
dc.description.bitstreamurl | http://deepblue.lib.umich.edu/bitstream/2027.42/78504/1/414_ftp.pdf | |
dc.identifier.doi | 10.1002/adma.201001761 | en_US |
dc.identifier.source | Advanced Materials | en_US |
dc.owningcollname | Interdisciplinary and Peer-Reviewed |
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