Skin-Effect Self-Heating in Air-Suspended RF MEMS Transmission-Line Structures
dc.contributor.author | Chow, Linda L. W. | en_US |
dc.contributor.author | Wang, Zhongde | en_US |
dc.contributor.author | Jensen, Brian D. | en_US |
dc.contributor.author | Saitou, Kazuhiro | en_US |
dc.contributor.author | Volakis, John Leonidas | en_US |
dc.contributor.author | Kurabayashi, Katsuo | en_US |
dc.date.accessioned | 2011-11-14T16:31:29Z | |
dc.date.available | 2011-11-14T16:31:29Z | |
dc.date.issued | 2006-12-04 | en_US |
dc.identifier.citation | Chow, L. W.; Wang, Z.; Jensen, B. D.; Saitou, K.; Volakis, J. L.; Kurabayashi, K. (2006). Skin-Effect Self-Heating in Air-Suspended RF MEMS Transmission-Line Structures." IEEE/ASME Journal of Microelectromechanical Systems 15(6): 1622-1631. <http://hdl.handle.net/2027.42/87277> | en_US |
dc.identifier.issn | 1057-7157 | en_US |
dc.identifier.uri | https://hdl.handle.net/2027.42/87277 | |
dc.description.abstract | Air-suspension of transmission-line structures using microelectromechanical systems (MEMS) technology provides the effective means to suppress substrate losses for radio-frequency (RF) signals. However, heating of these lines augmented by skin effects can be a major concern for RF MEMS reliability. To understand this phenomenon, a thermal energy transport model is developed in a simple analytical form. The model accounts for skin effects that cause Joule heating to be localized near the surface of the RF transmission line. Here, the model is validated through experimental data by measuring the temperature rise in an air-suspended MEMS coplanar waveguide (CPW). For this measurement, a new experimental methodology is also developed allowing direct current (dc) electrical resistance thermometry to be adopted in an RF setup. The modeling and experimental work presented in this paper allow us to provide design rules for preventing thermal and structural failures unique to the RF operation of suspended MEMS transmission-line components. For example, increasing the thickness from 1 to 3 mum for a typical transmission line design enhances power handling from 5 to 125 W at 20 GHz, 3.3 to 80 W at 50 GHz, and 2.3 to 56 W at 100 GHz (a 25-fold increase in RF power handling) | en_US |
dc.publisher | IEEE | en_US |
dc.title | Skin-Effect Self-Heating in Air-Suspended RF MEMS Transmission-Line Structures | en_US |
dc.type | Article | en_US |
dc.subject.hlbsecondlevel | Mechanical Engineering | en_US |
dc.subject.hlbtoplevel | Engineering | en_US |
dc.description.peerreviewed | Peer Reviewed | en_US |
dc.contributor.affiliationum | Department of Mechanical Engineering | en_US |
dc.contributor.affiliationother | Ansoft Corporation, San Jose, CA 95129 USA. the Department of Mechanical Engineering, Brigham Young University, Provo, UT 84602 USA. the Department of Electrical and Computer Engineering, Ohio State University, Columbus, OH 43212 USA. | en_US |
dc.description.bitstreamurl | http://deepblue.lib.umich.edu/bitstream/2027.42/87277/4/Saitou15.pdf | |
dc.identifier.doi | 10.1109/JMEMS.2006.883581 | en_US |
dc.identifier.source | IEEE/ASME Journal of Microelectromechanical Systems | en_US |
dc.owningcollname | Mechanical Engineering, Department of |
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