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Suppression of current fluctuations in a crossed E×BE×B field system for low-voltage plasma immersion treatment
dc.contributor.authorLevchenko, Igoren_US
dc.contributor.authorKeidar, Michaelen_US
dc.contributor.authorOstrikov, Kostyaen_US
dc.contributor.authorYu, M. Y.en_US
dc.date.accessioned2011-11-15T16:01:37Z
dc.date.available2011-11-15T16:01:37Z
dc.date.issued2006-01-01en_US
dc.identifier.citationLevchenko, I.; Keidar, M.; Ostrikov, K.; Yu, M. Y. (2006). "Suppression of current fluctuations in a crossed E×BE×B field system for low-voltage plasma immersion treatment." Journal of Applied Physics 99(1): 013301-013301-6. <http://hdl.handle.net/2027.42/87466>en_US
dc.identifier.urihttps://hdl.handle.net/2027.42/87466
dc.description.abstractPlasma transport in a hybrid dc vacuum arc plasma source for ion deposition and plasma immersion treatment is considered. It is found that external crossed electric and magnetic fields near the substrate can significantly reduce the relative amplitude of ion current fluctuations fI¯f at the substrate surface. In particular, fI¯f decreases with the applied magnetic field when the bias voltage exceeds 300 V300V, thus allowing one to reduce the deviations from the rated process parameters. This phenomenon can be attributed to an interaction between the metal-plasma jet from the arc source and the discharge plasma in the crossed fields.en_US
dc.publisherThe American Institute of Physicsen_US
dc.rights© The American Institute of Physicsen_US
dc.titleSuppression of current fluctuations in a crossed E×BE×B field system for low-voltage plasma immersion treatmenten_US
dc.typeArticleen_US
dc.subject.hlbsecondlevelPhysicsen_US
dc.subject.hlbtoplevelScienceen_US
dc.description.peerreviewedPeer Revieweden_US
dc.contributor.affiliationumDepartment of Aerospace Engineering, University of Michigan, Ann Arbor, Michigan 48109en_US
dc.contributor.affiliationotherSchool of Physics, University of Sydney, Sydney NSW 2006, Australiaen_US
dc.contributor.affiliationotherSchool of Physics, University of Sydney, Sydney NSW 2006, Australiaen_US
dc.contributor.affiliationotherInstitute for Theoretical Physics I, Ruhr University Bochum, Bochum 44780, Germanyen_US
dc.description.bitstreamurlhttp://deepblue.lib.umich.edu/bitstream/2027.42/87466/2/013301_1.pdf
dc.identifier.doi10.1063/1.2136416en_US
dc.identifier.sourceJournal of Applied Physicsen_US
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dc.owningcollnamePhysics, Department of


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