X-ray studies of annealing in thin-film semiconductors
dc.contributor.author | Clarke, Roy | en_US |
dc.date.accessioned | 2011-11-15T16:09:09Z | |
dc.date.available | 2011-11-15T16:09:09Z | |
dc.date.issued | 1997-07-01 | en_US |
dc.identifier.citation | Clarke, Roy (1997). "X-ray studies of annealing in thin-film semiconductors." AIP Conference Proceedings 417(1): 196-196. <http://hdl.handle.net/2027.42/87810> | en_US |
dc.identifier.other | APCPCS-417-1 | en_US |
dc.identifier.uri | https://hdl.handle.net/2027.42/87810 | |
dc.description.abstract | One of the most important issues in thin-film heterostructures is the nature of the interfaces. In general, their structure is likely to involve some degree of lattice strain, especially when the film is deposited on a mismatched substrate. The evolution of the film stress and its behavior during post-deposition processing is critical for many device applications, in particular where extreme operating conditions are encountered. In this presentation we illustrate the use of real-time x-ray scattering for in-situ annealing studies of semiconductor films, emphasizing the advantages of appropriate x-ray optics and fast area detectors.© 1997 American Institute of Physics. | en_US |
dc.publisher | The American Institute of Physics | en_US |
dc.rights | © The American Institute of Physics | en_US |
dc.title | X-ray studies of annealing in thin-film semiconductors | en_US |
dc.type | Article | en_US |
dc.subject.hlbsecondlevel | Physics | en_US |
dc.subject.hlbtoplevel | Science | en_US |
dc.description.peerreviewed | Peer Reviewed | en_US |
dc.contributor.affiliationum | University of Michigan, Ann Arbor, Michigan 48109-1120 | en_US |
dc.contributor.affiliationother | MHATT-CAT Center for Real-time X-ray Studies at the Advanced Photon Source | en_US |
dc.description.bitstreamurl | http://deepblue.lib.umich.edu/bitstream/2027.42/87810/2/196_1.pdf | |
dc.identifier.doi | 10.1063/1.54571 | en_US |
dc.identifier.source | SYNCHROTRON RADIATION INSTRUMENTATION: Tenth US National Conference | en_US |
dc.owningcollname | Physics, Department of |
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