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Nanoimprinted strain-controlled elastomeric gratings for optical wavelength tuning
dc.contributor.authorTung, Yi-Chungen_US
dc.contributor.authorKurabayashi, Katsuoen_US
dc.date.accessioned2011-11-15T16:09:57Z
dc.date.available2011-11-15T16:09:57Z
dc.date.issued2005-04-18en_US
dc.identifier.citationTung, Yi-Chung; Kurabayashi, Katsuo (2005). "Nanoimprinted strain-controlled elastomeric gratings for optical wavelength tuning." Applied Physics Letters 86(16): 161113-161113-3. <http://hdl.handle.net/2027.42/87849>en_US
dc.identifier.urihttps://hdl.handle.net/2027.42/87849
dc.description.abstractWe demonstrate strain-controlled gratings made of an organic elastomer, polydimethylsiloxane (PDMS), which can achieve optical wavelength tuning by varying their spatial periods. The whole device structure presented in this work incorporates a nanoimprinted PDMS grating integrated with electrostatic microelectromechanical systems actuators on a silicon chip. The fabrication of the device combines polymer soft lithography, nanoimprint lithography, and silicon micromachining across multiscale dimensions ranging from a few hundred nanometers to a few millimeters. The fine tuning capability with fast dynamic response of our PDMS/silicon hybrid optical grating device makes it attractive for use in various micro-optical instruments.en_US
dc.publisherThe American Institute of Physicsen_US
dc.rights© The American Institute of Physicsen_US
dc.titleNanoimprinted strain-controlled elastomeric gratings for optical wavelength tuningen_US
dc.typeArticleen_US
dc.subject.hlbsecondlevelPhysicsen_US
dc.subject.hlbtoplevelScienceen_US
dc.description.peerreviewedPeer Revieweden_US
dc.contributor.affiliationumDepartment of Mechanical Engineering, University of Michigan, Ann Arbor, Michigan 48109en_US
dc.description.bitstreamurlhttp://deepblue.lib.umich.edu/bitstream/2027.42/87849/2/161113_1.pdf
dc.identifier.doi10.1063/1.1900923en_US
dc.identifier.sourceApplied Physics Lettersen_US
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dc.owningcollnamePhysics, Department of


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