High Quality 3D Shape Reconstruction via Digital Refocusing and Pupil Apodization in Multi-wavelength Holographic Interferometry.

Abstract

Multi-wavelength holographic interferometry (MWHI) has good potential for evolving into a high quality 3D shape reconstruction technique. There are several remaining challenges, including 1) depth-of-field limitation, leading to axial dimension inaccuracy of out-of-focus objects; and 2) smearing from shiny smooth objects to their dark dull neighbors, generating fake measurements within the dark area. This research is motivated by the goal of developing an advanced optical metrology system that provides accurate 3D profiles for target object or objects of axial dimension larger than the depth-of-field, and for objects with dramatically different surface conditions. The idea of employing digital refocusing in MWHI has been proposed as a solution to the depth-of-field limitation. One the one hand, traditional single wavelength refocusing formula is revised to reduce sensitivity to wavelength error. Investigation over real example demonstrates promising accuracy and repeatability of reconstructed 3D profiles. On the other hand, a phase contrast based focus detection criterion is developed especially for MWHI, which overcomes the problem of phase unwrapping. The combination for these two innovations gives birth to a systematic strategy of acquiring high quality 3D profiles. Following the first phase contrast based focus detection step, interferometric distance measurement by MWHI is implemented as a next step to conduct relative focus detection with high accuracy. This strategy results in ±100mm 3D profile with micron level axial accuracy, which is not available in traditional extended focus image (EFI) solutions. Pupil apodization has been implemented to address the second challenge of smearing. The process of reflective rough surface inspection has been mathematically modeled, which explains the origin of stray light and the necessity of replacing hard-edged pupil with one of gradually attenuating transmission (apodization). Metrics to optimize pupil types and parameters have been chosen especially for MWHI. A Gaussian apodized pupil has been installed and tested. A reduction of smearing in measurement result has been experimentally demonstrated.