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Fabrication of nanoscale zero-mode waveguides using microlithography for single molecule sensing

dc.contributor.authorTeng, Chu-Hsiangen_US
dc.contributor.authorLionberger, Troy A.en_US
dc.contributor.authorZhang, Jinen_US
dc.contributor.authorMeyhöfe, Edgaren_US
dc.contributor.authorKu, Pei-Chengen_US
dc.date.accessioned2013-06-28T15:25:50Z
dc.date.available2013-06-28T15:25:50Z
dc.date.issued2012en_US
dc.identifier.citationTeng, Chu-Hsiang; Lionberger, Troy A.; Zhang, Jin; Meyhöfe, Edgar; Ku, Pei-Cheng (2012). "Fabrication of nanoscale zero-mode waveguides using microlithography for single molecule sensing." Nanotechnology 23(45): 455301. <http://hdl.handle.net/2027.42/98608>en_US
dc.identifier.urihttp://stacks.iop.org/0957-4484/23/i=45/a=455301en_US
dc.identifier.urihttps://hdl.handle.net/2027.42/98608
dc.description.abstractWe present a novel approach to the fabrication of zero-mode waveguides (ZMWs) using inexpensive processing techniques. Our method is capable of rapid fabrication of circular nanoapertures with diameters ranging from 70 nm to 2 μm, allowing us to perform a detailed characterization of the dependence of the fluorescence emission on the waveguide diameter. We also validated the use of the fabricated ZMWs by detecting single molecule binding events with a signal-to-noise ratio of ten.en_US
dc.publisherIOP Publishingen_US
dc.titleFabrication of nanoscale zero-mode waveguides using microlithography for single molecule sensingen_US
dc.typeArticleen_US
dc.subject.hlbsecondlevelPhysicsen_US
dc.subject.hlbtoplevelScienceen_US
dc.description.peerreviewedPeer Revieweden_US
dc.description.bitstreamurlhttp://deepblue.lib.umich.edu/bitstream/2027.42/98608/1/0957-4484_23_45_455301.pdf
dc.identifier.doi10.1088/0957-4484/23/45/455301en_US
dc.identifier.sourceNanotechnologyen_US
dc.owningcollnamePhysics, Department of


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