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A piezo-thermal probe for thermomechanical analysis
dc.contributor.authorGaitas, Angeloen_US
dc.contributor.authorGianchandani, Sachien_US
dc.contributor.authorZhu, Weibinen_US
dc.date.accessioned2013-07-03T19:31:17Z
dc.date.available2013-07-03T19:31:17Z
dc.date.issued2011-05en_US
dc.identifier.citationGaitas, Angelo; Gianchandani, Sachi; Zhu, Weibin (2011). "A piezo-thermal probe for thermomechanical analysis." Review of Scientific Instruments, 82(5): 53701. <http://hdl.handle.net/2027.42/98646>en_US
dc.identifier.urihttps://hdl.handle.net/2027.42/98646
dc.publisherThe American Institute of Physicsen_US
dc.subjectAtomic Force Microscopyen_US
dc.subjectMicromachiningen_US
dc.subjectMicromechanical Devicesen_US
dc.subjectMicrosensorsen_US
dc.subjectPiezoelectric Devicesen_US
dc.subjectThermal Expansionen_US
dc.titleA piezo-thermal probe for thermomechanical analysisen_US
dc.typeArticleen_US
dc.subject.hlbsecondlevelPhysicsen_US
dc.subject.hlbtoplevelScienceen_US
dc.description.peerreviewedPeer Revieweden_US
dc.identifier.pmid21639501en_US
dc.description.bitstreamurlhttp://deepblue.lib.umich.edu/bitstream/2027.42/98646/1/RevSciInstrum_82_053701.pdf
dc.identifier.doi10.1063/1.3587624en_US
dc.identifier.sourceReview of Scientific Instrumentsen_US
dc.owningcollnamePhysics, Department of


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