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Photo-triggering and secondary electron produced ionization in electric discharge ArF* excimer lasers
dc.contributor.authorXiong, Zhongminen_US
dc.contributor.authorKushner, Mark J.en_US
dc.date.accessioned2013-07-03T19:31:40Z
dc.date.available2013-07-03T19:31:40Z
dc.date.issued2011-10-15en_US
dc.identifier.citationXiong, Zhongmin; Kushner, Mark J. (2011). "Photo-triggering and secondary electron produced ionization in electric discharge ArF* excimer lasers." Journal of Applied Physics, 110(8): 83304. <http://hdl.handle.net/2027.42/98721>en_US
dc.identifier.urihttps://hdl.handle.net/2027.42/98721
dc.publisherThe American Institute of Physicsen_US
dc.subjectArgon Compoundsen_US
dc.subjectDischarges (Electric)en_US
dc.subjectExcimer Lasersen_US
dc.subjectPhotoionisationen_US
dc.titlePhoto-triggering and secondary electron produced ionization in electric discharge ArF* excimer lasersen_US
dc.typeArticleen_US
dc.subject.hlbsecondlevelPhysicsen_US
dc.subject.hlbtoplevelScienceen_US
dc.description.peerreviewedPeer Revieweden_US
dc.description.bitstreamurlhttp://deepblue.lib.umich.edu/bitstream/2027.42/98721/1/JApplPhys_110_083304.pdf
dc.identifier.doi10.1063/1.3644953en_US
dc.identifier.sourceJournal of Applied Physicsen_US
dc.owningcollnamePhysics, Department of


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