Experimental evaluation of an adaptive Joule--Thomson cooling system including silicon-microfabricated heat exchanger and microvalve components
dc.contributor.author | Zhu, Weibin | en_US |
dc.contributor.author | Park, Jong M. | en_US |
dc.contributor.author | White, Michael J. | en_US |
dc.contributor.author | Nellis, Gregory F. | en_US |
dc.contributor.author | Gianchandani, Yogesh B. | en_US |
dc.date.accessioned | 2013-07-03T19:31:41Z | |
dc.date.available | 2013-07-03T19:31:41Z | |
dc.date.issued | 2011-03 | en_US |
dc.identifier.citation | Zhu, Weibin; Park, Jong M.; White, Michael J.; Nellis, Gregory F.; Gianchandani, Yogesh B. (2011). "Experimental evaluation of an adaptive Joule--Thomson cooling system including silicon-microfabricated heat exchanger and microvalve components." Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films, 29(2): 21005. <http://hdl.handle.net/2027.42/98726> | en_US |
dc.identifier.uri | https://hdl.handle.net/2027.42/98726 | |
dc.publisher | AVS | en_US |
dc.subject | Cooling | en_US |
dc.subject | Elemental Semiconductors | en_US |
dc.subject | Heat Exchangers | en_US |
dc.subject | Microactuators | en_US |
dc.subject | Microvalves | en_US |
dc.subject | Piezoelectric Devices | en_US |
dc.subject | Silicon | en_US |
dc.title | Experimental evaluation of an adaptive Joule--Thomson cooling system including silicon-microfabricated heat exchanger and microvalve components | en_US |
dc.type | Article | en_US |
dc.subject.hlbsecondlevel | Physics | en_US |
dc.subject.hlbtoplevel | Science | en_US |
dc.description.peerreviewed | Peer Reviewed | en_US |
dc.description.bitstreamurl | http://deepblue.lib.umich.edu/bitstream/2027.42/98726/1/JVA021005.pdf | |
dc.identifier.doi | 10.1116/1.3545917 | en_US |
dc.identifier.source | Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films | en_US |
dc.owningcollname | Physics, Department of |
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