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Experimental evaluation of an adaptive Joule--Thomson cooling system including silicon-microfabricated heat exchanger and microvalve components
dc.contributor.authorZhu, Weibinen_US
dc.contributor.authorPark, Jong M.en_US
dc.contributor.authorWhite, Michael J.en_US
dc.contributor.authorNellis, Gregory F.en_US
dc.contributor.authorGianchandani, Yogesh B.en_US
dc.date.accessioned2013-07-03T19:31:41Z
dc.date.available2013-07-03T19:31:41Z
dc.date.issued2011-03en_US
dc.identifier.citationZhu, Weibin; Park, Jong M.; White, Michael J.; Nellis, Gregory F.; Gianchandani, Yogesh B. (2011). "Experimental evaluation of an adaptive Joule--Thomson cooling system including silicon-microfabricated heat exchanger and microvalve components." Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films, 29(2): 21005. <http://hdl.handle.net/2027.42/98726>en_US
dc.identifier.urihttps://hdl.handle.net/2027.42/98726
dc.publisherAVSen_US
dc.subjectCoolingen_US
dc.subjectElemental Semiconductorsen_US
dc.subjectHeat Exchangersen_US
dc.subjectMicroactuatorsen_US
dc.subjectMicrovalvesen_US
dc.subjectPiezoelectric Devicesen_US
dc.subjectSiliconen_US
dc.titleExperimental evaluation of an adaptive Joule--Thomson cooling system including silicon-microfabricated heat exchanger and microvalve componentsen_US
dc.typeArticleen_US
dc.subject.hlbsecondlevelPhysicsen_US
dc.subject.hlbtoplevelScienceen_US
dc.description.peerreviewedPeer Revieweden_US
dc.description.bitstreamurlhttp://deepblue.lib.umich.edu/bitstream/2027.42/98726/1/JVA021005.pdf
dc.identifier.doi10.1116/1.3545917en_US
dc.identifier.sourceJournal of Vacuum Science & Technology A: Vacuum, Surfaces, and Filmsen_US
dc.owningcollnamePhysics, Department of


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