Automatic iterative fitting of Rutherford backscattering spectra from multielement samples

Abstract

A computer code (BASF) has been constructed to perform automatic iterative fitting of Rutherford backscattering spectra using only the experimental spectrum and the parameter set defining the experiment. The code may be used to analyze samples containing anywhere from two to five elements. The code output consists of the total amount of each element present and a composition versus depth profile.The code's performance was verified on both computer generated and experimental backscattering spectra. Samples consisting of nickel substrates onto which layers of pure nickel and pure aluminum have been alternately evaporated in thicknesses of 130 and 100 A, respectively, were used to produce backscattering spectra. These spectra, when analyzed, demonstrated that the code was able to determine the total aluminum content to within 3% and the ratio of aluminum to nickel to within 1% of the thickness monitor readings taken during evaporation. The code has shown the ability to recognize sharp interfaces in well resolved spectra. The code performs equally well on slowly varying concentration profiles which are created during the annealing of layered samples. Limitations on the code and its use include the precise knowledge of the relevant experimental parameters used as input, and complete specification of all elements in the sample. The ultimate limits on the code's accuracy are the resolution of the spectrum and the accuracy of the computed stopping powers.This code provides a significant advantage over other spectrum fitting codes in that the process is fully automated and does not require constant user interaction. Further, it provides the capability of accurately determining concentration profiles in layered samples where the layer thickness is of the order 100 A.