X-Ray Microanalysis in the Environmental SEM: A Challenge or a Contradiction?

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dc.contributor.author Mansfield, John F. en_US
dc.date.accessioned 2006-09-08T20:21:06Z
dc.date.available 2006-09-08T20:21:06Z
dc.date.issued 2000-04 en_US
dc.identifier.citation Mansfield, John F.; (2000). "X-Ray Microanalysis in the Environmental SEM: A Challenge or a Contradiction?." Mikrochimica Acta 132 (2-4): 137-143. <http://hdl.handle.net/2027.42/42449> en_US
dc.identifier.issn 0026-3672 en_US
dc.identifier.uri http://hdl.handle.net/2027.42/42449
dc.description.abstract  In this paper, the application of X-ray energy dispersive spectroscopy in the environmental scanning electron microscope is reviewed. Various techniques that have been used to remove the effects of the beam spreading in the gaseous environment are discussed, specifically the pressure variation techniques and the beam-stop method. The results of the application of modified versions, developed at the University of Michigan, are also presented. It is shown that quantitative analysis in the environmental SEM, operating at 30 kV, is possible at short working distances (6 mm to 7.2 mm, gas path length 1.2 mm to 2.2 mm) in the 70 to 350 Pa range. en_US
dc.format.extent 273828 bytes
dc.format.extent 3115 bytes
dc.format.mimetype application/pdf
dc.format.mimetype text/plain
dc.language.iso en_US
dc.publisher Springer-Verlag; Springer-Verlag Wien en_US
dc.subject.other Legacy en_US
dc.subject.other Key Words: Environmental SEM; Energy Dispersive Analysis; Beam Spreading; Pressure Variation in ESEM; Water Vapour in ESEM. en_US
dc.title X-Ray Microanalysis in the Environmental SEM: A Challenge or a Contradiction? en_US
dc.type Article en_US
dc.subject.hlbsecondlevel Materials Science and Engineering en_US
dc.subject.hlbsecondlevel Chemistry en_US
dc.subject.hlbsecondlevel Chemical Engineering en_US
dc.subject.hlbtoplevel Science en_US
dc.subject.hlbtoplevel Engineering en_US
dc.description.peerreviewed Peer Reviewed en_US
dc.contributor.affiliationum North Campus Electron Microbeam Analysis Laboratory, 417 SRB, University of Michigan, 2455 Hayward, Ann Arbor MI 48109-2143, USA, US en_US
dc.contributor.affiliationumcampus Ann Arbor en_US
dc.description.bitstreamurl http://deepblue.lib.umich.edu/bitstream/2027.42/42449/1/604-132-2-4-137_01320137.pdf en_US
dc.identifier.doi http://dx.doi.org/10.1007/s006040050054 en_US
dc.identifier.source Mikrochimica Acta en_US
dc.owningcollname Interdisciplinary and Peer-Reviewed
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