The evolution of texture in thin films and multilayers via synchrotron transmission Laue and grazing-incidence X-ray scattering

Abstract

Sputter-deposited films and multilayers are used for a wide variety of applications including protective coatings on turbine engine blades, magnetic recording heads, optical elements, electronic packaging, X-ray filters and monochromator components to name a few examples. This wide range of interest requires growth thicknesses from a few nanometres to tens of micrometres depending on the product. In many applications, specific film textures in the growth direction as well as in the plane of growth are required. The control and manipulation of these textures can be accomplished by using advanced characterization techniques to select particular processing conditions. A variety of X-ray methods including grazing-incidence X-ray scattering, conventional pole figure studies and synchrotron white-beam transmission Laue scattering were used to study texture evolution for the thinnest films up to the thickest multilayer coatings.