On the model of Teflon ablation in an ablation-controlled  discharge

Keidar, Michael; Boyd, Iain D.; Beilis, Isak I.

On the model of Teflon ablation in an ablation-controlled discharge

Keidar, Michael; Boyd, Iain D.; Beilis, Isak I.

2001-06-07

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Citation

Keidar, Michael; Boyd, Iain D; Beilis, Isak I (2001). "On the model of Teflon ablation in an ablation-controlled discharge." Journal of Physics D: Applied Physics. 34(11): 1675-1677. <http://hdl.handle.net/2027.42/48908>

Abstract

A kinetic model is developed of Teflon ablation caused by a plasma. The model takes into account the returned atom flux that forms in the non-equilibrium layer during the ablation. This approach makes it possible to calculate the ablation rate for the case when the Teflon surface temperature and the density and temperature in the plasma bulk are known.

Publisher

IOP Publishing Ltd

ISSN

0022-3727

Other DOIs

http://dx.doi.org/10.1088/0022-3727/34/11/318

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Article

Handle

https://hdl.handle.net/2027.42/48908

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