On the model of Teflon ablation in an ablation-controlled discharge

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On the model of Teflon ablation in an ablation-controlled discharge
Keidar, Michael; Boyd, Iain D.; Beilis, Isak I.
Citation: Keidar, Michael; Boyd, Iain D; Beilis, Isak I (2001). "On the model of Teflon ablation in an ablation-controlled discharge." Journal of Physics D: Applied Physics. 34(11): 1675-1677. <http://hdl.handle.net/2027.42/48908>
Abstract: A kinetic model is developed of Teflon ablation caused by a plasma. The model takes into account the returned atom flux that forms in the non-equilibrium layer during the ablation. This approach makes it possible to calculate the ablation rate for the case when the Teflon surface temperature and the density and temperature in the plasma bulk are known.
ISSN: 0022-3727
Other DOI(s):
          http://dx.doi.org/10.1088/0022-3727/34/11/318
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Type(s): Article
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