TOPICAL REVIEW: Recent progress in nanoimprint technology and its applications
dc.contributor.author | Guo, L. Jay | en_US |
dc.date.accessioned | 2006-12-19T18:59:27Z | |
dc.date.available | 2006-12-19T18:59:27Z | |
dc.date.issued | 2004-06-07 | en_US |
dc.identifier.citation | Guo, L Jay (2004). "TOPICAL REVIEW: Recent progress in nanoimprint technology and its applications." Journal of Physics D: Applied Physics. 37(11): R123-R141. <http://hdl.handle.net/2027.42/48920> | en_US |
dc.identifier.issn | 0022-3727 | en_US |
dc.identifier.uri | https://hdl.handle.net/2027.42/48920 | |
dc.description.abstract | Nanoimprint is an emerging lithographic technology that promises high-throughput patterning of nanostructures. Based on the mechanical embossing principle, nanoimprint technique can achieve pattern resolutions beyond the limitations set by the light diffractions or beam scatterings in other conventional techniques. This article reviews the basic principles of nanoimprint technology and some of the recent progress in this field. It also explores a few alternative approaches that are related to nanoimprint as well as additive approaches for patterning polymer structures. Nanoimprint technology can not only create resist patterns as in lithography but can also imprint functional device structures in polymers. This property is exploited in several non-traditional microelectronic applications in the areas of photonics and biotechnology. | en_US |
dc.format.extent | 3118 bytes | |
dc.format.extent | 1582713 bytes | |
dc.format.mimetype | text/plain | |
dc.format.mimetype | application/pdf | |
dc.language.iso | en_US | |
dc.publisher | IOP Publishing Ltd | en_US |
dc.title | TOPICAL REVIEW: Recent progress in nanoimprint technology and its applications | en_US |
dc.type | Article | en_US |
dc.subject.hlbsecondlevel | Physics | en_US |
dc.subject.hlbtoplevel | Science | en_US |
dc.description.peerreviewed | Peer Reviewed | en_US |
dc.contributor.affiliationum | Department of Electrical Engineering and Computer Science, The University of Michigan, Ann Arbor, MI 48109, USA | en_US |
dc.contributor.affiliationumcampus | Ann Arbor | en_US |
dc.description.bitstreamurl | http://deepblue.lib.umich.edu/bitstream/2027.42/48920/2/d4_11_r01.pdf | en_US |
dc.identifier.doi | http://dx.doi.org/10.1088/0022-3727/37/11/R01 | en_US |
dc.identifier.source | Journal of Physics D: Applied Physics. | en_US |
dc.owningcollname | Interdisciplinary and Peer-Reviewed |
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