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TOPICAL REVIEW: Recent progress in nanoimprint technology and its applications

dc.contributor.authorGuo, L. Jayen_US
dc.date.accessioned2006-12-19T18:59:27Z
dc.date.available2006-12-19T18:59:27Z
dc.date.issued2004-06-07en_US
dc.identifier.citationGuo, L Jay (2004). "TOPICAL REVIEW: Recent progress in nanoimprint technology and its applications." Journal of Physics D: Applied Physics. 37(11): R123-R141. <http://hdl.handle.net/2027.42/48920>en_US
dc.identifier.issn0022-3727en_US
dc.identifier.urihttps://hdl.handle.net/2027.42/48920
dc.description.abstractNanoimprint is an emerging lithographic technology that promises high-throughput patterning of nanostructures. Based on the mechanical embossing principle, nanoimprint technique can achieve pattern resolutions beyond the limitations set by the light diffractions or beam scatterings in other conventional techniques. This article reviews the basic principles of nanoimprint technology and some of the recent progress in this field. It also explores a few alternative approaches that are related to nanoimprint as well as additive approaches for patterning polymer structures. Nanoimprint technology can not only create resist patterns as in lithography but can also imprint functional device structures in polymers. This property is exploited in several non-traditional microelectronic applications in the areas of photonics and biotechnology.en_US
dc.format.extent3118 bytes
dc.format.extent1582713 bytes
dc.format.mimetypetext/plain
dc.format.mimetypeapplication/pdf
dc.language.isoen_US
dc.publisherIOP Publishing Ltden_US
dc.titleTOPICAL REVIEW: Recent progress in nanoimprint technology and its applicationsen_US
dc.typeArticleen_US
dc.subject.hlbsecondlevelPhysicsen_US
dc.subject.hlbtoplevelScienceen_US
dc.description.peerreviewedPeer Revieweden_US
dc.contributor.affiliationumDepartment of Electrical Engineering and Computer Science, The University of Michigan, Ann Arbor, MI 48109, USAen_US
dc.contributor.affiliationumcampusAnn Arboren_US
dc.description.bitstreamurlhttp://deepblue.lib.umich.edu/bitstream/2027.42/48920/2/d4_11_r01.pdfen_US
dc.identifier.doihttp://dx.doi.org/10.1088/0022-3727/37/11/R01en_US
dc.identifier.sourceJournal of Physics D: Applied Physics.en_US
dc.owningcollnameInterdisciplinary and Peer-Reviewed


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