A micromachined 2D positioner with electrothermal actuation and sub-nanometer capacitive sensing
Chu, Larry L.; Gianchandani, Yogesh B.
Chu, Larry L; Gianchandani, Yogesh B (2003). "A micromachined 2D positioner with electrothermal actuation and sub-nanometer capacitive sensing." Journal of Micromechanics and Microengineering. 13(2): 279-285. <http://hdl.handle.net/2027.42/49040>
AbstractThis paper reports on a multi-purpose two-axis micropositioner with sub-nanometer position sensing for precise feedback control. Along each axis it has an electrothermal actuator, a capacitive position sensor and a displacement amplifier that provides a gain of 3.37 for the sensor. It is fabricated from custom SOI wafers using dry etching, and each component is electrically and thermally isolated by silicon nitride. For a fabricated device of 65 μm thickness, the measured displacement sensitivity is 0.333 fF nm−1, which corresponds to 0.3 nm resolution with available laboratory instrumentation. The range is ≈19 μm along each axis for the positioner, which corresponds to 66 μm travel in the sense combs. Using an external parallel inductor, a positioning displacement of 9.6 μm offers a shift of 240 kHz in L–C resonance, corresponding to a sensitivity of 25 Hz nm−1.
IOP Publishing Ltd
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