Now showing items 11-20 of 33
Monte Carlo simulation of phase separation during thin‐film codeposition
(The American Institute of Physics, 1993-08-01)
The results of Monte Carlo simulation of phase separation during binary film coevaporation are presented for a range of deposition conditions. The model employed assumes that phase separation occurs through surface ...
Interfacial and surface energetics of CoSi2
(The American Institute of Physics, 1994-11-01)
The energetics of the CoSi2‐Si interface and the CoSi2 surface have been investigated by analyzing the equilibrium shapes of isolated silicide precipitates. CoSi2 precipitates grown by heating 2 Å of Co on a clean, ...
The evolution of texture in thin films and multilayers via synchrotron transmission Laue and grazing-incidence X-ray scattering
(IOP Publishing Ltd, 1995-04-14)
Sputter-deposited films and multilayers are used for a wide variety of applications including protective coatings on turbine engine blades, magnetic recording heads, optical elements, electronic packaging, X-ray filters ...
Synthesis and properties of microlaminate structures by ion beam assisted deposition
(Elsevier, 1993)
Films of Al, Al2O3, Mo and MoSix were formed by ion beam assisted deposition (IBAD) at R ratios between 0.004 and 0.1 and film thicknesses between 150 and 1100 nm. Al films were crystalline with a strong (111) fiber texture ...
Structural investigation of Fe silicide films grown by pulsed laser deposition
(The American Institute of Physics, 1994-08-15)
Pulsed laser deposition was used to grow epitaxial β‐FeSi2 films on Si(111) (1×1) and Si(111) (7×7) with the following epitaxial orientations: β‐FeSi2(001)//Si(111) with β‐FeSi2[010]//Si〈110〉 and three rotational variants. ...
Surface roughness and in-plane texturing in sputtered thin films
(The American Institute of Physics, 1998-08-01)
Real surfaces are not flat on an atomic scale. Studying the effects of roughness on microstructural evolution is of relevance because films are sputtered onto nonideal surfaces in many applications. To this end, amorphous ...
Growth anisotropy and self-shadowing: A model for the development of in-plane texture during polycrystalline thin-film growth
(The American Institute of Physics, 1997-08-01)
The development of a preferred crystallographic orientation in the plane of growth, an in-plane texture, is addressed in a model that incorporates anisotropic growth rates of a material and self-shadowing. Most crystalline ...
Combined transmission electron microscopy and x‐ray study of the microstructure and texture in sputtered Mo films
(The American Institute of Physics, 1994-10-15)
The microstructure and texture of thin Mo films sputtered onto the native oxide of Si(100) wafers were investigated with both conventional reflection x‐ray pole figures, and transmission electron microscopy and diffraction. ...
Growth textures of thick sputtered films and multilayers assessed via synchrotron transmission Laue
(The American Institute of Physics, 1995-09-15)
The growth textures of thick sputtered Mo metallizations and Mo/W multilayers, were characterized via a synchrotron white‐beam (WB) x‐ray transmission Laue technique. Transmission x‐ray diffraction studies of Mo specimens ...
Low‐temperature homoepitaxial growth on nonplanar Si substrates
(The American Institute of Physics, 1994-11-01)
The kinetics associated with the breakdown of epitaxy at low temperatures are studied for growth onto a number of Si surfaces, including (001), (117), (115), and (113). These surfaces are all initially generated at trench ...