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The evolution of texture in thin films and multilayers via synchrotron transmission Laue and grazing-incidence X-ray scattering
(IOP Publishing Ltd, 1995-04-14)
Sputter-deposited films and multilayers are used for a wide variety of applications including protective coatings on turbine engine blades, magnetic recording heads, optical elements, electronic packaging, X-ray filters ...
Growth textures of thick sputtered films and multilayers assessed via synchrotron transmission Laue
(The American Institute of Physics, 1995-09-15)
The growth textures of thick sputtered Mo metallizations and Mo/W multilayers, were characterized via a synchrotron white‐beam (WB) x‐ray transmission Laue technique. Transmission x‐ray diffraction studies of Mo specimens ...